Microscopy & Microtechniques 77 New Glove Box Mounted Coating System


Quorum Technologies is pleased to introduce the Q150GB, a fully automatic, modular glove box version of the market leading Q150T ES bench top turbomolecular-pumped coating system


The Q150GB is suitable for SEM, TEM and many thin-film coating applications and comes as standard with both sputtering and carbon rod evaporation capabilities. The high vacuum environment allows both oxidising and non-oxidising metals to be sputtered.


The modular design allows the vacuum chamber to be mounted either through the base or inside the glove box itself. A separate power supply can be floor mounted and positioned conveniently beneath the glove box or bench. The touch screen user interface is housed in a robust stainless steel case and can be positioned outside of the glove box environment, if preferred.


The Q150GB allows quick access to both stored and customer-entered coating ‘recipes’ and the performance and flexibility of the system can be further enhanced by a wide range of options, including ‘drop-in’ specimen stages and coating head inserts, glow discharge and film thickness monitor control.


Like all other Quorum Technologies products, the Q150GB comes with a generous three-year warranty.


For further information please visit www.quorumtech.com.


MORE INFO. 169


New AFM Semiconductor Characterisation Solution Introduced


Bruker has announced the release of the Dimension Icon®


SSRM-HR, a new


atomic force microscope (AFM) configuration including the Scanning Spreading Resistance Microscopy (SSRM) module, designed specifically for high- resolution (HR) semiconductor characterisation.


Integrating Bruker’s industry-leading Dimension Icon AFM platform with an environmental control system capable of 1ppm gas purity and high-vacuum control, the Dimension Icon SSRM-HR system provides vastly improved repeatability and spatial resolution in semiconductor carrier profiling.


MORE INFO. 170 MORE INFO. 171


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