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www.us-tech.com


July, 2022


Automated Plasma Cleaner from SurfX


REDONDO BEACH, CA — Surfx Technologies has introduced its STA-10iL automated plasma machine designed for high-vol- ume manufacturing. Whether for cleaning dies,


silicon wafers, medical devices or molded plastic parts, the STA- 10iL can be easily configured for many jobs. The system offers a slim footprint, fast lead times and flexible configurations, leav- ing no excuse to skip plasma sur- face preparation for critical processes. Inside the STA-10iL, a


three-axis gantry selectively applies the most advanced atmospheric plasma to sub- strates. Surfx’s Atomflo™ con- troller operates with low voltage, radio frequency (RF) power, and generates a uniform, particle free and electrically neutral plas- ma that is safe on the most sen- sitive electronics. Surfx Technologies’ versa-


tile conveyor design allows for rapid surface preparation of elec-


STA-10iL atmospheric plasma system.


Contact: Surfx Technologies,


LLC, 26831 Manhattan Beach Boulevard, Redondo Beach, CA 90278 % 310-558-0770 E-mail: sales@surfxtechnologies.com Web: www.surfxtechnologies.com


See at SEMICON West, Booth 2128


New High-Precision Linear Axis from ETEL


DL Technology has been the leader in micro dispensing technology for over 15 years. For more 


www.dltechnology.com 216 River Street, Haverhill, MA 01832 • P: 978.374.6451 • F: 978.372.4889 • sales@dltechnology.com


SCHAUMBURG, ILLINOIS — With the new TBS Linear Axis from ETEL, semiconductor equipment manufacturers can now integrate a high-precision linear axis enabling outstanding performance in term of accuracy and precision in its category of one-degree-of-freedom (1-DOF) systems. With its ISO 2 rating


for cleanrooms and incorporated HEIDENHAIN Group encoder technologies, the TBS provides high cleanliness and accuracy for any application needing to carry up to 45 kg of payload with high precision and stability of macro and micro motion. The TBS 1-DOF mechanical


bearing is based on an indirect drive linear axis that is con- trolled by a high-performance, low cogging servomotor using a dual encoder feedback control scheme. This is combined with spe-


cific design characteristics and options such as thermal decou- pling of heat sources, high stiff- ness and a micrometric hard stop to ensure that its performance is maintained over a long operating lifetime,


tronics, including all types of IC packages.


improving the end


users’ ROI. As part of ETEL’s commit-


ment to providing high quality motion systems to the semiconduc- tor market, the TBS is especially suitable for Wafer Process Control applications such as Overlay Metrology, Critical Dimension and Thin film Metrology, as well as photonics. Any customer who has adapted an alternate solution can receive a hands-on evaluation in order to prove the TBS’s superior


performance. Contact: HEIDENHAIN


Corp., 333 E. State Parkway,


Schaumburg, IL 60173 % 847-519-4702 E-mail: jdougherty@heidenhain.com Web: www.heidenhain.us


See at SEMICON West, Booth 230


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