CS Industry Awards Winners 2011
Metrology, Test and Measurement Award BlueRay DS
The Cascade Microtech BlueRay DS probe station allows testing double-sided substrates typically performed in a laboratory with the ability to meet the throughput and reliability requirements of a production environment. The BlueRay DS is a universal platform for a multitude of applications in semiconductor test such as LED, MEMS, and optical devices. - Testing backside-emitting LED is now possible. The prober can be equipped with an integrating sphere or fiber assembly to collect and measure the light at the backside of the substrate. This allows higher measurement accuracy compared to a setup using a reflected beams. - Inspecting transparent and semi-transparent substrates require a light source below the specimen.
In combination with a Shack-Hartmann sensor, this tool is the perfect platform for quality inspection of microlens arrays. - The test of a MEMS device, for example a semiconductor microphone, requires stimulation by noise and measurement of the electrical response on top. The BlueRay DS provides the platform to execute such tests even in a high-volume production environment.
The wafer prober is designed to grow with the production demand. The machine concept is modular and can be expanded step by step from the development lab to the production fab. In the simplest setup, the probe station is just a semi-automatic benchtop tool that can be expanded to a fully automatic prober with wafer cassette
feeding. Wafer probers are typically designed to place the substrates to a flat chuck and probe from the top side only. If the customer’s substrates are structured on both sides, the wafer test requires a special probe system to get access to both the top and bottom of the wafer. Before the BlueRay-DS, such substrates only could be tested in the packaged state. The packaging itself is costly and the cost of packaging bad die can be saved if the bad die are identified earlier in the process. With the BlueRay DS, Cascade has transitioned double-sided probing into the production test process, becoming the first company that offers a modular wafer probing solution that grows with the process requirements of the development lab to the production fab.
The BlueRay DS allows test instrumentation of 100 mm; this can be any measurement setup for electrical and non-electrical parameters. Compared to competitive products, the free space at the substrate could be increased enormously. Where other systems only have a fiber to collect light of the DUT, the BlueRay DS can hold an entire 4” integrating sphere.
In combination with the precise motorized holder, the positioning of the instrumentation can be as close as a few µm to the DUT.
This new opportunity opens a new window into test setups that were never possible before, and existing tests can reach a new dimension of measurement accuracy in a production environment.
Editors Comment: The LED industry is striving for better testing standards. Cascade’s tool could be part of the solution.
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www.compoundsemiconductor.net June 2011
WINNER
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