Equipment and Materials ♦ news digest
communicate via an Ethernet network, enabling centralised, facility-wide equipment monitoring and data collection.
In the event of excess gas flow, fire detection or facility shut down input, pneumatically actuated Emergency Shut Off (ESO) valves will interrupt the process gas supply to the manifold lines, initiating an automatic shutdown. A pneumatic ESO button is mounted on the front of the enclosure to manually trigger a system shutdown. In either event, an audible horn and blinking LED status lights notify operators that a risk has been detected.
The exhaustible MGE-XS enclosure accommodates hazardous and non-hazardous gases and is constructed of welded 11 gauge cold-rolled steel. It also includes reinforced rear mounting holes for wall installations or an optional welded steel rack for free standing applications. To further customise on- site fit-up of the MGE-XS, each unit features adjustable steel shelves, adjustable cylinder straps and adjustable back or top mounted exhaust ducts.
All MGE-X systems meet SEMI S2 and Uniform Fire Code requirements and are equipped with UL-approved fire sprinklers and ¼” safety glass windows. Self closing and lockable doors and windows, as well as a steel cylinder divider plate, and gas identification safety labels come standard, further meeting the specifications for the safe handling of hazardous production materials.
Internal panel components are orbitally welded, helium leak tested and certified to the highest purity standards. All valves, regulators, transducers, tubing and fitting bodies are 316L stainless steel to prevent corrosion from hazardous gas applications.
Jim Murphy, Division Manager of SEMI-GAS Systems says, “SEMI-GAS created a defining way to deliver low volume gases with the compact MGE-X, and the XS model is another advance. Even with low volume applications, customers want to minimise human-system interaction and maximise process tool up-time. MGE-XS accomplishes both these industry demands with automatic switchover capabilities, while also meeting the same expectations for safety, reliability, quality and minimal footprint found in the original ground-breaking model.”
Aixtron makes strategic
changes to executive board The mutual decision sees CFO Wolfgang Breme leaving the group
Aixtron SE, a provider of deposition equipment to the semiconductor industry, has announced that that CFO Wolfgang Breme is leaving the group as of May 31st, 2014 by mutual agreement.
He will pursue new career opportunities outside the company.
“The Supervisory Board approved the termination of his service agreement with effect as of May 31st, 2014 and regrets Mr. Breme’s departure,” says Kim Schindelhauer, chairman of
“The Cee 300MXD developer features state-of-the-art technology that creates a viable pathway for our customers to decrease process cycle times, reduce cost of ownership, and accelerate time to market,” said Justin Furse, Brewer Science
June 2014
www.compoundsemiconductor.net 101
the Supervisory Board of Aixtron, and thanks Breme for his commitment.
“Over the past nine years, Mr. Breme has contributed decisively to the successful development and financial stability with his high personal commitment. Supervisory Board, Executive Board and the Aixtron team wish him all the very best for his future endeavours,” adds Schindelhauer.
A new CFO will not be appointed.
The chairman of the Executive Board, Martin Goetzeler, will take over the tasks previously performed by Breme. The service agreement of the current Chief Operating Officer, Bernd Schulte, will be renewed for a term of three years until March 31st, 2018.
Brewer Science
commercialises megasonic developer for compound
semiconductor applications Megasonic developer applies uniform acoustic energy to spinning substrates to gently dissolve and remove films and residues without damaging fragile device structures
Brewer Science, a supplier of advanced materials, processes, and equipment to the microelectronics industry, has announced the first commercial placement of a Cee 300MXD megasonic developer. This innovative developer was commissioned by MicroChem Corp.
The Brewer Science Cee 300MXD megasonic developer applies uniform acoustic energy to spinning substrates to gently dissolve and remove films and residues without damaging fragile device structures. This precision handling results in stable dimensional control of vertical profiles uniformly across the wafer surface, enabling fabrication of high-aspect-ratio structures for the MEMS, display, compound semiconductor, and advanced packaging markets. Applications include radio- frequency (RF) power, MEMS, sensors, and acoustic wave devices used for wireless communication.
“MicroChem is very pleased to team with Brewer Science on what we believe could be an enabling technology for the future,” said Michael Stan, Applications Engineering Manager for MicroChem Corp. “As the MEMS industry and integrated packaging technology continue to demand higher-aspect-ratio structures for TSV and RDL layers, enhanced development techniques will likely become mainstream. The cost-effective approach being pioneered by Brewer Science gives a supplier such as MicroChem Corp. the advantage of being able to rapidly prototype formulations and processes to meet these demands,” he added.
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