ANALYTICAL AND LABORATORY EQUIPMENT 27
Fig. 3. The fine adjustment of the object or sample is performed by the piezo nanopositioning system.
Photo: PI.
three-dimensional writing task. Te difficulty is compounded even more by the fact that it is not enough to move towards certain positions in a highly precise manner. Te path is just as important as the target here, and the application therefore also requires a precise path control. During the travel, the laser intensity is then varied according to the track speed, in order to achieve the desired printing result. Te system used for sample positioning is thus a key component of the laser lithography device Photonic Professional of Nanoscribe GmbH.
Precise positioning Here a positioning system was chosen from the product range of PI (Physik Instrumente). PI offers a selection of high-dynamics and high- resolution piezo nanopositioning systems for scientific and industrial applications. Te P-563 multi-axis stage is set on a usual microscope XY scanner stage, which allows a positioning range of the piezo writing volume on an area of up to 100 × 100mm². Te travel range of the piezo can cover a writing volume of up to 300 × 300 × 300µm³, whereby the repeatability is in the nanometre range.
Piezo actuators are the driving force behind this nanopositioning system. Tese piezo actuators convert electrical energy directly into mechanical energy and vice versa. At the same time, travel ranges of
up to around one millimetre can be achieved with resolutions down to the nanometre range and high dynamics with frequencies of up to several kilohertz. Te very high motion resolution is only possible because the motion is based on crystalline effects and there are no classic mechanical components that have friction or mechanical play. Piezo actuators can furthermore move heavy loads and have a compact design.
Over the past four decades, the Karlsruhe-based company has become the leading manufacturer of nanopositioning technology. PI is a private company with more than 500 employees world-wide and a flexible, vertically integrated organisation which enables PI to fulfill almost any request in the field of innovative precision positioning technology.
All key technologies are developed in-house. Tis means that every phase from the design right down to the shipment can be controlled:
Te precision mechanics and the electronics as well as the position sensors and the piezo ceramics or actuators. Te latter are produced by the subsidiary company PI Ceramic. PI has its own sales and service offices in all important markets.
Moreover, the company maintains testing devices for nanometrology on three continents. PI Shanghai and
PI USA have additional development and manufacturing resources which allow rapid local reaction to custom- engineered specifications.
Nanoscribe GmbH, the first spin-off of Karlsruhe Institute of Technology (KIT) introduced the 3D laser lithography system PhotonicProfessional on the market in early 2008.
Over the past five years, the company has established itself as market and technology leader in the area of 3D laser lithography.
Te multitude of systems sold to leading research institutes and universities across the world demonstrates the triumph of this innovative technology.
Te portfolio of the company additionally comprises in-house developed resists tailored to the different needs of customers. Te portfolio is completed by consultation on reproducing these three-dimensional polymer structures in metals or semiconductors
For more information ✔ at
www.scientistlive.com/eurolab Steffen Arnold is Head of Marketing and
Products at Physik Instrumente (PI) GmbH & Co. KG. Martin Hermatschweiler is
Managing Director of Nanoscribe GmbH. Physik Instrumente (PI) GmbH & Co. KG is based in Karlsruhe, Germany.
www.pi.ws
www.scientistlive.com
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