Page 24
www.us-
tech.com
December, 2011
RASIRC Intros Steamer Turbo with Hot Gas Blending
San Diego, CA — RASIRC® has intro-
duced the new Steamer Turbo for specialty applications in the semicon- ductor and photovoltaic industries. This is the company’s first steamer with integrated gas blending control, which reportedly solves the common problem of condensation when blend- ing steam with compressed gases. The unit delivers high flow
rates of steam combined with nitro- gen or oxygen, which can improve the uniformity of thermal oxide films and momentum for particle removal after condensation. The company’s prod-
ucts deliver ultrapure water vapor for semiconductor, photovoltaics, nanotechnology, and other manufac- turing applications. A variety of semiconductor and
photovoltaic manufacturing process- es require that water vapor be mixed with nitrogen or oxygen. To avoid condensation, the gases must be heated above the steam dewpoint, minimally 80°C or hotter, for those applications that need to impart more energy to the substrate upon contact. Without tight gas tempera- ture control there is a serious risk of
premature condensation leading to contamination and film non-unifor- mities. The Steamer Turbo solves this
problem by incorporating an inte- grated compressed gas control sys- tem that can deliver up to 100 slm of gas at 120°C. The control system includes a mass flow controller, regu- lator, filter, and in-line gas heater. The close coupling of the gas heater to the purified steam outlet ensures cleanliness and controls the tempera- ture of the blended gas, thus virtual- ly eliminating condensation.
Combining the company’s
patented steam purification technol- ogy with UHP steam generation and hot compressed gas provides a unique method to deliver both energy and ultrapure water through conden- sation at the wafer surface. The inte-
Steamer turbo pro cleans semicon wafers.
gration of hot compressed gas pro- vides a sweep gas to move the con- densed steam away from the wafer. This can enable new forms of wafer cleaning not possible before. Contact: RASIRC, 11760
Sorrento Valley Road, Suite E, San Diego, CA 92121 % 858-259-1220 E-mail:
info@rasirc.com Web:
www.rasirc.com
Techcon Adds 34 Gauge
Dispense Tip Garden Grove, CA — Techcon Systems, a product group of OK International, has added the new 34- gauge dispense tip to its product line.
New dispense tip.
With an inside diameter range of 0.003 to 0.0045-in.
(0.076 to
0.114mm), the new 34-gauge tip is especially suitable for dispensing micro shots of low-viscosity fluids. The 34-gauge tip consists of an
electro-polished stainless steel can- nula for consistent material flow and a double helix polypropylene hub with lime green coloring for easy identification. In addition, the new tip is silicone- and chloride-free. The tip is available in both bulk
quantity (TE734025-1000) and packs of 50 pieces (TE734025PK). Contact: OK International,
12151 Monarch St., Garden Grove, CA 92841 % 714-799-9910 fax: 714- 799-9533 Web: www.okinternation-
al.com or
www.techconsystems.com
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32 |
Page 33 |
Page 34 |
Page 35 |
Page 36 |
Page 37 |
Page 38 |
Page 39 |
Page 40 |
Page 41 |
Page 42 |
Page 43 |
Page 44 |
Page 45 |
Page 46 |
Page 47 |
Page 48 |
Page 49 |
Page 50 |
Page 51 |
Page 52 |
Page 53 |
Page 54 |
Page 55 |
Page 56 |
Page 57 |
Page 58 |
Page 59 |
Page 60 |
Page 61 |
Page 62 |
Page 63 |
Page 64 |
Page 65 |
Page 66 |
Page 67 |
Page 68 |
Page 69 |
Page 70 |
Page 71 |
Page 72 |
Page 73 |
Page 74 |
Page 75 |
Page 76 |
Page 77 |
Page 78 |
Page 79 |
Page 80 |
Page 81 |
Page 82 |
Page 83 |
Page 84