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Companies Facts

Moreover, Carl Zeiss has received a licence from the University of California in San Francisco (UCSF) for the commercialization of “Multidirectional Selective Plane Illumination Microscopy” (mSPIM), an advan- ced illumination technique for light sheet fluore- scence microscopy.

http://www.zeiss.de C

EA-Leti and Replisaurus Technologies, Inc., a developer of a metallization technology for

integrated passives, copper pillars and 3D integration (TSV), have completed a crucial step toward com- mercialization of Replisaurus’ innovative ElectroChe- mical Pattern Replication (ECPRTM) metallization process. In less than two years since launching their common lab at Leti, the two partners have optimized the ECPR master process (the master is a 200mm or 300mm silicon wafer filled with copper and sized for final structures to be patterned). The technology is now mature enough to be applied on customer target products for evaluation.

ECPR is a cost-effective alternative to the dual da- mascene process that provides deposition of copper structures in excess of 3µm thick with 5µm or less spacing between features. It eliminates the requi- rement for CMP or photolithography equipment or related materials, as well as the need for solvents.

http://www.leti.fr http://www.replisaurus.com

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NanoFocus AG Lindnerstrasse 98 | 46149 Oberhausen Phone +49 (0) 208-62 000-0 | Fax +49 (0) 208-62 000 info@nanofocus.de | www.nanofocus.de WKN: 540066 | ISIN: DE 0005400667

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