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nanotimes Reports

11-06/07 :: June/July 2011

The European Nanometrology Landscape

Richard K Leach, Robert Boyd, Theresa Burke, Hans-Ulrich Danzebrink, Kai Dirscherl, Thorsten Dziomba, Mark Gee, Ludger Koenders, Valérie Morazzani, Allan Pidduck, Debdulal Roy, Wolfgang E S Unger and Andrew Yacoot: The European nano- metrology landscape, In: Nanotechnology, Volume 22(2011), Issue 6, February 2011, Article 062001, DOI:10.1088/0957- 4484/22/6/062001:

http://dx.doi.org/10.1088/0957-4484/22/6/062001 Prof Richard Leach, Engineering Measurement, NPL, Phone: +44 20 8943 6303: http://www.npl.co.uk/

The review paper is published in the peer-review journal Nanotechnology, and was written by experts based at:

• NPL • euspen • Germany‘s national measurement institute PTB and their Federal Institute for Materials Research and Testing

• Denmark‘s national measurement institute Danish Fundamental Metrology • France‘s Laboratoire National de Métrologie et d’Essais • QinetiQ

The paper summarises the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale.

This paper was published as an output of the EC-funded Co-Nanomet project. Co-Nanomet is a programme of activities to address the need within Europe to develop the required measurement frame to successfully support the development and economic exploitation of nanotechnology.

The final output of Co-Nanomet will be a European Strategy for Nanometrology, which will be published in early 2011.