IC Industry Award Winner Sub System/Component Award Applied iSYS
iSYS is an integrated subfab system built around an innovative mainframe. The iSYS product mainframe incorporates known ancillary technologies, e.g vacuum pumps, abatement and pipe heaters. The mainframe technology is a step improvement from today’s custom and practice because of the central control of these ancillary devices, and ownership of the environmental, health, safety and process transparency during energy saving modes of operation. The subfab is systemized to reduce energy consumption during both chamber idle and chamber active periods. Customers are demanding energy
reductions beyond ITRS roadmap deliverables for 2012, typically 30%. Subfab energy accounts for 40% of the total factory energy consumed in production of devices. The focus on subfab will reduce this subfab energy consumption by > 20% and therefore overall fab energy consumption by > 8%.
Semiconductor manufacturing process
tools are dependent on ancillary equipment such as vacuum pumps, chillers, abatement for optimum performance. Typically these ancillary equipment pieces are located remotely below the tool, hence ‘subfab’. Applied Materials subfab business, built around an innovative mainframe integrates these separate remote components into a system (iSYS) to reduce operating cost per wafer pass on all core business product lines. The unique differentiator in the
product is that Applied Materials remove redundant layers of equipment and
synchronizes the operation of these devices from a central controller interfaced to the process tool. The value therefore to the customers is a match of energy consumption to process demand, reducing energy per wafer pass by > 20%. There are further benefits in an integrated package of faster startup, predictable operation, repeatable spares, smaller footprint and automatic calculation of carbon footprint through totalisation of process gases for greenhouse gas reporting. Applied Materials are the only company to offer an open platform mainframe, allowing endusers to select vacuum pump manufacturers for example. Applied Materials iSYS project has
brought together 10 separate subfab equipment manufacturers, from Japan, USA, Korea, Japan into an integrated energy saving product for the first time. Subfab is a very fragmented business,
there are 7 major vacuum pump suppliers and 26 abatement suppliers. Of 26 abatement suppliers, only 4 make more than $20 million revenue per year. As customers consolidate into larger organizations with more purchasing power, then the ability of smaller regional companies to match the global expectations of their customers is very tough.
Applied Materials enables the growth of fragmented regional companies and technologies into a global best known method for subfab equipment operation and environmental compliance at the lowest operating cost per wafer pass.
17
www.euroasiasemiconductor.com Issue IV 2010
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32