October, 2023
www.us-tech.com
Entrepix Optimizes CMP Solutions for the Semicon Continued from previous page
tion equipment up and running. This engineering prowess en- sures that Entrepix customers can maximize the performance and lifespan of their CMP equip- ment. Entrepix operates an ISO
9001:2015 certified in-house foundry that provides CMP serv- ices such as process develop- ment, consumable testing and qualification, overflow produc- tion, and equipment demonstra- tions as well a distributed flow process that allows Entrepix to work with local partners to pro- vide full process solutions. “By providing comprehensive servic- es, we continually work to be a one-stop solution for all CMP and wafer cleaning require- ments,” says foundry business unit manager Scott Drews.
Wafer Cleaning System The new redesigned Entre-
pix DSS-200 wafer cleaning sys- tem is a state-of-the-art wafer scrubber that builds upon the legacy of the OnTrak platform while introducing numerous up- grades for a more efficient, cost- effective CMP Process. As the OEM for OnTrak systems, En- trepix has engineered the DSS- 200 for reliability, longevity, and seamless compatibility with legacy OnTrak systems. Most re- cently, the DSS-200 OnTrak has become highly sought after by Silicon Carbide (SiC) device makers due to its established record of cleaning efficiency and familiarity as well as excellent service and parts support. The Entrepix DSS-200 was
born out of the need to keep the long-time industry standard wafer scrubber running as the original OEM moved away from supporting the legacy platform. Entrepix began to provide obso- lescence solutions and support prior to acquiring the OEM li- cense and redesigning the DSS- 200 for today’s manufacturing environment. The new Entrepix DSS-200
offers several compelling fea- tures that enhance the platform to address the evolving needs of today’s manufacturing environ- ment. These features include: re- placement and modernization of obsolete parts; user friendly soft- ware; full data capture; flexible user security configurations; and expansion availability for motion controllers, distributed I/O and sensor monitoring. The Entrepix DSS-200 is
available in three configurations: CE, Synergy, and Integra. These configurations enable a compre- hensive range of applications, in- cluding post-CMP clean, pre- bond clean, pre-photo clean, ad- vanced packaging applications, post-metal deposition, post-ILD deposition, post-scribe, and sub-
1 See at productronica, Hall B1 Booth 121
strate manufacturing. “The DSS- 200 is an enduring product that continues to thrive as the pre- ferred system for post-CMP cleaning, ensuring its longevity in the industry,” says product manager Josh Beckenhauer. The Entrepix Entegrity
head tester is another example of the company’s commitment to providing value and cost savings to customers. The Entegrity head tester is a tabletop polish head testing system that pro- vides customers with invaluable data regarding their mission- critical consumables that make
Page 19
up the Titan, Profiler, Contour, and EVO polishing heads. Entrepix has established it-
Entegrity head tester.
self as a leading provider of CMP and wafer cleaning solutions through its constant commit- ment to innovation, customer satisfaction, and industry ex- pertise. With its extensive port- folio of products and services, in- cluding the cutting-edge DSS- 200 OnTrak and Entegrity head testing system, Entrepix contin- ues to add value through lead- ing-edge ideas and designs, driv- ing efficiency and reliability for
Continued on page 25
creates automated testing and programming solutions for nearly any ap- plication and device type.
From hand test to high volume, our modular building block concept allows the widest variety of system configurations possible.
PET-4 M Thermal Test Work Station
Copperhead® Thermal Test Socket
Model 802 Tabletop Test Handler w/ Dual Z
Model 802 Thermal Test Handler w/ Tape Input
Model 1900 Automatic Jedec Tray Laser Marker w/ Vision
Model 901 Test Handler w/ Bowl Input and Tape Output
Model 8000 Dual Tri-Temp Test Handler
Visit
exatron.com for more.
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