AFM-in-SEM Using the SEM to navigate the AFM tip with nanometer pre-
cision provides quick localization and study of nanostructures and nanodevices of interest, making analysis precise, comprehensive, and time- and cost-efficient. Combined with FIB, AFM-in-SEM technology offers a range of measurements that are impossible to do with separate stand-alone devices or by other techniques. Additionally, this opens up new possibilities for advanced mea- surements in the field of metrology, FIB milling optimization, and electron beam induced current or spectroscopy analysis where the combination of AFM and SEM is essential. However, these appli- cations are beyond the scope of this article. Taken together, the main advantages of the LiteScope are
a compact design compatible with most SEM systems, simulta- neous in situ measurement of multiple signals, addition of 3D information to 2D SEM images, a variety of self-sensing and self-actuating probes without laser detection, fast and precise navigation of the probes to the ROI by SEM, a plethora of mea- surement techniques for comprehensive sample analysis, and web-based soſtware.
Acknowledgments Tis article was created with state support from the Tech-
nology Agency of the Czech Republic within the Program for the Support of Applied Research ZÉTA for the project Development of SPM applications suitable for correlative microscopy, project number TJ01000434. Te authors also thank all researchers who prepared and provided samples for the analysis.
References [1] L Crouzier et al., Nanotechnol 10 (2019) 1523–36. [2] S Flegler et al., Scanning and Transmission Electron Microscopy: An Introduction, W.H. Freeman and Com- pany, 1997, 65–68.
[3] J Beauvais et al., Proc of SPIE 10291 (1997) 175–99. [4] N Jalili and K Laxminarayana, Mechatronics 14 (2004) 907–45.
[5] A Matheson, Spectroscopy 33 (2018) 26–28. [6] P DeBoer et al., Nature Methods 12 (2015) 503–13. [7] RL Mitchell et al., Microsc Microanal 25 (Suppl 2) (2019) 416–17.
[8] U Kohl-Roscher, Zeiss (2015),
https://zeiss.com. [9] Z Wu et al., Sensors 15 (2015) 28764–71.
[10] M Dukic et al., Sci Rep 5 (2015) 16393. [11] J Neuman et al., Microsc Microanal 25 (Suppl 2) (2019) 430–31. [12] M Knyazeva and M Pohl, Metallogr Microstruct Anal 2(2013) 113–21.
[13] A Rocha et al., Stainless Steels and Alloys, ed. Z Duriagina, IntechOpen, London, 2018, 1–14.
[14] M Urbánek et al., Appl Materials 6 (2018) 060701. [15] S Sundararajan et al., Ultramicroscopy 91 (2002) 111–18. [16] N Randall et al., Tin Solid Films v. 290–291 (1996) 348–54. [17] Alemnis, Pushing the Frontier of Nanomechanical Test- ing,
https://alemnis.com.
[18] D Chronopoulos et al., Chem Comm 55 (2019) 1088–91.
Get Radical With Evactron® Plasma Cleaning
Evactron® E50 and E-TC Turbo-Plasma™ cleaner for your SEM/FIB
Evactron plasma cleaners generate neutral oxygen radicals from room air. The radicals do the hydro- carbon removal, not the plasma. Features include:
External hollow cathode plasma radical source “POP™” Ignition at high vacuum—no venting Touchpad or Android tablet operation Set cleaning time, cycles and power levels Cleans in minutes for days of perfect imaging and analysis
WWW.EVACTRON.COM 1-650-369-0133
46
www.microscopy-today.com • 2020 May
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32 |
Page 33 |
Page 34 |
Page 35 |
Page 36 |
Page 37 |
Page 38 |
Page 39 |
Page 40 |
Page 41 |
Page 42 |
Page 43 |
Page 44 |
Page 45 |
Page 46 |
Page 47 |
Page 48 |
Page 49 |
Page 50 |
Page 51 |
Page 52 |
Page 53 |
Page 54 |
Page 55 |
Page 56 |
Page 57 |
Page 58 |
Page 59 |
Page 60 |
Page 61 |
Page 62 |
Page 63 |
Page 64 |
Page 65 |
Page 66 |
Page 67 |
Page 68 |
Page 69 |
Page 70 |
Page 71 |
Page 72 |
Page 73 |
Page 74 |
Page 75 |
Page 76 |
Page 77 |
Page 78 |
Page 79 |
Page 80 |
Page 81 |
Page 82 |
Page 83 |
Page 84
