AFM-in-SEM
Figure 1: CPEM principle and CPEM view. (a) Schematics illustrate the sample area scanned simultaneously by AFM tip and SEM electron beam. Acquired data are correlated to create the resulting 3D CPEM view that can accommodate multiple signals (for example, AFM topography with SEM secondary and back-scattered electrons), as demonstrated by a tungsten-chromium sample containing hafnium oxide particles (b).
Hitachi, JEOL) and can be easily mounted on the SEM stage through a dedicated adaptor (Figure 2). It is a highly custom- izable plug-and-play solution with optional scanner configu- rations (both in open- and closed-loop mode) with a version compatible with magnetic immersion SEM, and installation takes only a few minutes. Te standard configuration offers a large scanning area up to 100 × 100 × 100 μm and a resolution down to 0.2 nm. An optional scanner configuration improves resolution to 0.07 nm and decreases the scanning area to 38 × 38 × 38 μm. Further customization includes specimen exchange through the SEM load-lock system [8] or addition of a nanoindenter module or specialized sample and probe holders. Te system includes the NenoBox™ control unit, which
is connected to both the AFM and SEM detectors. Tis allows simultaneous acquisition and correlation of AFM and SEM signals through CPEM technology. Data are visualized and processed in NenoView™, a web-based soſtware package that does not require pre-installation or a dedicated computer. Data can be accessed from any device connected to the internet or local network. CPEM technology allows for true data corre- lation, and some applications are detailed in the Results and Discussion section.
40 Compatibility with a variety of self-sensing and self-actu-
ating probes operated up to 75 kHz, based on a tuning fork principle or piezoresistive cantilever, significantly extends capabilities of the instrument [9]. A list of supported techniques is presented in Table 1. Additionally, self-sensing probes elimi- nate several disadvantages of traditional AFM cantilevers with optical detection, such as the need for frequent laser alignment, imaging artifacts, and optical diffraction limitations [10]. Use as a dedicated AFM with NenoCase™, which is designed to dampen vibrations and to allow measurements under different atmospheres, is also possible.
Results and Discussion Correlative microscopy. CPEM represents
a unique
approach to correlative imaging since it enables simultaneous acquisition of SEM and AFM data and precisely merges them. Tus, the differences between material (SEM) and topography (AFM) contrast can be quickly and precisely distinguished. Te working principle of CPEM is as follows: the SEM view enables precise positioning of the AFM probe to the ROI on the sample mounted on the LiteScope’s piezo scanner. Ten, the electron beam is focused near the AFM tip, and the SEM is set to point or spectroscopy mode. Te AFM tip, as well as
www.microscopy-today.com • 2020 May
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