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Microspectroscopy


characterization of contamination earlier in the research and development of new manufacturing processes. Te funda- mental principles and examples presented here display the advantages of O-PTIR in the identification of defects and contamination in hard drive and related electronic indus- tries. O-PTIR spectroscopy has the potential to be disruptive in the important and growing field of IR microspectroscopy. Key advantages of O-PTIR over the technologically mature and traditional FT-IR microspectroscopy approaches include submicron IR resolution; collection of spectra in far-field (non- contact) reflection mode that are FT-IR transmission-like, yet free of scattering artifacts; confocal-like measurement; and simultaneous Raman analyses. mIRage is a unique and vastly more useful measurement capability. Application areas are increasing and encompass all the traditional FT-IR fields such as polymers, defect analysis, and life science. Further adoption by the IR and Raman community will fuel exploration into new ways O-PTIR will break new limits.


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[5] Z Li et al., SPIE Nanoscience+ Engineering, International Society for Optics and Photonics, 2015, p. 954912–18.


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[9] C Marcott et al., J Molec Struct 1210 (2020) 128045. https:// doi.org/10.1016/j.molstruc.2020.128045.


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[11] RM Sullenberger et al., Opt Lett 42(2) (2017) 203–06. [12] Z Li et al., Conference on Lasers and Electro-Optics, 2016, Optical Society of America, San Jose, CA, p. ATu3J.7.


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[23] X Li et al., Anal Chem 91 (2019) 10750–56. [24] TSMC Press Release, Hsinchu, Taiwan, R.O.C., February 15, 2019.


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