Microspectroscopy
characterization of contamination earlier in the research and development of new manufacturing processes. Te funda- mental principles and examples presented here display the advantages of O-PTIR in the identification of defects and contamination in hard drive and related electronic indus- tries. O-PTIR spectroscopy has the potential to be disruptive in the important and growing field of IR microspectroscopy. Key advantages of O-PTIR over the technologically mature and traditional FT-IR microspectroscopy approaches include submicron IR resolution; collection of spectra in far-field (non- contact) reflection mode that are FT-IR transmission-like, yet free of scattering artifacts; confocal-like measurement; and simultaneous Raman analyses. mIRage is a unique and vastly more useful measurement capability. Application areas are increasing and encompass all the traditional FT-IR fields such as polymers, defect analysis, and life science. Further adoption by the IR and Raman community will fuel exploration into new ways O-PTIR will break new limits.
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