AFM-in-SEM
the electron beam, remain stationary during data acquisition, and scanning is conducted solely by the piezo scanner. Tis configuration ensures a constant offset between the AFM and SEM images, which is removed in a postprocessing step [11]. Te result is a perfect correlation of multiple signals providing insight into the sample surface properties. Te data can be also displayed in a scalable 3D view, which may help facilitate data interpretation (Figure 1a). CPEM can accommodate several types of signals including secondary (SE) and back-scattered electrons (BSE) (Figure 1b), electron beam induced current (EBIC), and cathodoluminescence (CL). Figure 3 illustrates the use of CPEM on two samples, exfo-
liated WSe2 flakes on Si nanopillars and a duplex steel sample. Figure 3a shows a multilayered WSe2
is barely visible in the SEM image, but it is clearly visible flake, which is deformed
by placement on 100 nm high Si nanopillars. A monolayer of WSe2
by AFM topography. Localization of such a small structure by separate AFM and SEM instruments would be an extremely tedious process with a high level of uncertainty, which is elimi- nated by the AFM-in-SEM approach. Te scalable 3D CPEM view of correlated data helps to visualize and understand how
the flakes cover the nanopillars. A certain shape of the WSe2 monolayer over the nanopillars creates a single-photon emitter useful for quantum cryptography for secure communications. Figure 3b shows a sample of ferritic-austenitic duplex steel.
Figure 2: The AFM module can be easily integrated into existing SEMs. (a) Schematics showing the main dimensions and parts of the microscope, includ- ing the AFM probe. (b) The arrow highlights the scanhead mounted inside the SEM chamber.
Tis material exhibits improved material and thermal proper- ties in comparison with either completely ferritic or austenitic steel. Tis results in higher strength with high ductility, out- standing corrosion-resistance properties, higher impact value, and better conductivity [12]. Nevertheless, failure in duplex steel processing can modify the balance of alloying elements, which leads to a drastic deterioration of its advantageous prop- erties [13]. Features of duplex steel are difficult to identify by a single
technique. SEM signals visualize the difference in crystallo- graphic orientation of the twin grains within the same austen- ite phase and surrounding ferrite matrix. However, the duplex
Table 1: List of measurement modes supported by the LiteScope. Mechanical Properties
Atomic force microscopy (AFM) Energy dissipation
Force modulation microscopy (FMM) Force-distance measurement Nanoindentation Nanomanipulation
Electrical Properties
Scanning tunneling microscopy (STM) Kelvin probe force microscopy (KPFM) Conductive AFM (C-AFM) Conductive CPEM (C-CPEM) Spectroscopy regimes
Electro-mechanical Properties Piezoresponse force microscopy (PFM) 2020 May •
www.microscopy-today.com
Application Topography
Local elastic properties (tapping mode) Local elastic properties (contact mode) Local sample hardness (non-topographic) Depth-dependent material characterization Various in situ operations, sample handling Application
Sub-nanometer topography Local surface potential Conductivity map
Conductivity map including insulated areas Local electrical properties (non-topographic) Application
Piezoelectric domain imaging 41
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