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Optical Photothermal Infrared Microspectroscopy with Simultaneous Raman – A New Non-Contact Failure Analysis Technique for Identification of <10 μm Organic Contamination in the Hard Drive and other Electronics Industries


Mustafa Kansiz,1 * Craig Prater,1 Abel Demissie,3 Yanling Chen,3 *mkansiz@photothermal.com


Abstract: Optical Photothermal Infrared (O-PTIR) spectroscopy is a new technique for measuring submicron spatial resolution IR spectra with little or no sample preparation. This speeds up analysis times benefiting high-volume manufacturers through gaining insight into process contamination that occurs during development and on pro- duction lines. The ability to rapidly obtain far-field non-contact IR spectra at high spatial resolution facilitates the chemical identification of small organic contaminants that are not possible to measure with conventional Fourier transform infrared (FT-IR) microspectroscopy. The unique pump-probe system architecture also facilitates submi- cron simultaneous IR+Raman microscopy from the same spot with the same spatial resolution. With these unique capabilities, O-PTIR is finding utilization in the high-volume and high-value industries of high-tech componentry (memory storage, electronics, displays, etc.).


Keywords: infrared, O-PTIR, Raman, microscopy, failure analysis, hard drive


Introduction Seagate Technology, a manufacturer of advanced hard-


disc drives (HDDs), uses many microscopy and analytical techniques, including scanning probe microscopy (SPM), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), Fourier transform infrared (FT-IR) spec- troscopy, Auger electron spectroscopy, and others to identify nanoscale contamination. Tese techniques vary in sample preparation requirements, chemical specificity, spatial reso- lution, acquisition and analysis time, complexity, automation capabilities, and cost. Several systems have very high spatial resolution but suffer from inadequate chemical specificity for the determination of organic contamination (Figure 1). Some systems have high chemical sensitivity but have poorer spatial resolution or are slower in time-to-data and require specialized training. For example, traditional FT-IR microscopy methods with spatial resolution >10 μm fail to efficiently characterize submicron contamination and involve sample preparation methods, such as attenuated total reflection (ATR), that do not support automation. State-of-the-art recording head clean rooms and processes are designed to deliver a clean recording head to high-tolerance magnetic recording systems. Contami- nation identification and control is critical to the ongoing suc- cessful development of the manufacturing processes needed to deliver new HDD technologies.


26 doi:10.1017/S1551929520000917 During a recent Seagate Technology review of tech-


nology used to identify contamination, a relatively new technique, Optical Photothermal Infrared (O-PTIR) spec- troscopy, was evaluated and found to provide a better bal- ance between chemical specificity, spatial resolution, and complexity than other techniques. O-PTIR microscopy, with its submicron capability, limited sample preparation needs, typical microscopy training, and IR spectra that are com- parable to spectra collected using current FT-IR methods, was found to be a valuable addition to Seagate’s contamina- tion characterization suite. To test the system, a customized sampling accessory was built that allowed loading of mul- tiple samples during one measurement run to improve effi- ciency and time-to-answers. In a series of recent analyses, more than 90% of the organic contaminates were identified using O-PTIR. In less than one year, a commercial mIRage™ O-PTIR microscope (Photothermal Spectroscopy Corp) has become a valuable asset for rapid high sampling rate iden- tification of contamination during the development of new manufacturing processes.


Limitations of Current Methods So, what makes this technology such a quantum leap


in the field of vibrational spectroscopy? FT-IR is one of the most commonly used techniques for chemical analysis. Te combination of FT-IR and microscopy provides two key abili- ties: (1) the ability to perform IR spectroscopic analysis on discrete microscopic regions of a sample, and (2) the ability to map the distribution of different chemical species in het- erogeneous samples. But there remain several fundamental limitations of conventional FT-IR microspectroscopy, includ- ing poor spatial resolution, complex sample preparation, and spectral artifacts. In far-field microscopy, including FT-IR, optical diffrac-


tion limits spatial resolution to a length scale on the order of the IR wavelength of light used to make the measurement. Specifically, the minimum detectable separation δ between two objects using the Rayleigh criterion is given by:


δ


= 061. nNA


λ (1) www.microscopy-today.com • 2020 May


Eoghan Dillon,1 and Gary Kunkel3


1Photothermal Spectroscopy Corp, Santa Barbara, CA 93101 2Light Light Solutions, Athens, GA 3Seagate Technology, Bloomington, MN


Michael Lo,1 Jay Anderson,1 Curtis Marcott,2


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