11-01 :: December 2010 / January 2011

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of processing parameters, giving the required flexibi- lity to support research into nanoelectronic materials – including carbon nanotubes, graphene and silicon nanowires - enabling us to overcome roadblocks to ongoing semiconductor development.”

“Some researchers are still relying on simple thermal furnaces to develop nanomaterials,” explains Ben Jensen of Surrey NanoSystems. “The NanoGrowth system‘s comprehensive suite of deposition and processing capabilities, plus end-to-end processing in vacuum, gives both researchers and commercial de- velopers precise and automated control over catalyst deposition and material growth, ....”

In addition to these sales, Surrey NanoSystems has built a third system for its in-house nanomaterials

research effort, targeting materials for new forms of conducting via structures and dielectric materials to support the continued scaling of semiconductor de- vices. This system has three processing chambers, automated handling, and includes every processing option available, providing the best possible platform for research. Spare capacity on this tool will be made available to universities and their researchers working in related fields.

http://www.surreynanosystems.com http://www.ati.surrey.ac.uk/

Guan Yow Chen, Ben Jensen, Vlad Stolojan and S.R.P. Sil- vab: Growth of carbon nanotubes at temperatures compa- tible with integrated circuit technologies, In: Carbon, Volu- me 49(2011), Issue 1, January 2011, Pages 280-285: http://dx.doi.org/10.1016/j.carbon.2010.09.021