11-01 :: December 2010 / January 2011


nanotimes Companies


9


of processing parameters, giving the required flexibi- lity to support research into nanoelectronic materials – including carbon nanotubes, graphene and silicon nanowires - enabling us to overcome roadblocks to ongoing semiconductor development.”


“Some researchers are still relying on simple thermal furnaces to develop nanomaterials,” explains Ben Jensen of Surrey NanoSystems. “The NanoGrowth system‘s comprehensive suite of deposition and processing capabilities, plus end-to-end processing in vacuum, gives both researchers and commercial de- velopers precise and automated control over catalyst deposition and material growth, ....”


In addition to these sales, Surrey NanoSystems has built a third system for its in-house nanomaterials


research effort, targeting materials for new forms of conducting via structures and dielectric materials to support the continued scaling of semiconductor de- vices. This system has three processing chambers, automated handling, and includes every processing option available, providing the best possible platform for research. Spare capacity on this tool will be made available to universities and their researchers working in related fields.


http://www.surreynanosystems.com http://www.ati.surrey.ac.uk/


Guan Yow Chen, Ben Jensen, Vlad Stolojan and S.R.P. Sil- vab: Growth of carbon nanotubes at temperatures compa- tible with integrated circuit technologies, In: Carbon, Volu- me 49(2011), Issue 1, January 2011, Pages 280-285: http://dx.doi.org/10.1016/j.carbon.2010.09.021


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44  |  Page 45  |  Page 46  |  Page 47  |  Page 48  |  Page 49  |  Page 50  |  Page 51  |  Page 52  |  Page 53  |  Page 54  |  Page 55  |  Page 56  |  Page 57  |  Page 58  |  Page 59  |  Page 60  |  Page 61  |  Page 62  |  Page 63  |  Page 64  |  Page 65  |  Page 66  |  Page 67  |  Page 68  |  Page 69  |  Page 70  |  Page 71  |  Page 72  |  Page 73  |  Page 74  |  Page 75  |  Page 76  |  Page 77  |  Page 78  |  Page 79  |  Page 80  |  Page 81  |  Page 82  |  Page 83  |  Page 84  |  Page 85  |  Page 86  |  Page 87  |  Page 88  |  Page 89  |  Page 90  |  Page 91  |  Page 92  |  Page 93  |  Page 94  |  Page 95