11-01 :: December 2010 / January 2011

nanotimes

Companies Facts

The lithography equipment to be installed at CNF includes two specialized mask aligner toolsets for the SUSS MA/BA6 aligner: Substrate Conformal Imprin- ting Lithography (SCIL), a technology developed by SUSS MicroTec in conjunction with Philips Research, that provides an inexpensive means of defining features of 10nm or less with high reproducibility by using a full-size imprint stamp and MO Exposure Optics, a patented technique developed by SUSS MicroTec’s daughter company SUSS MicroOptics. http://www.suss.com

http://www.cnf.cornell.edu

production solutions for the fabrication of advanced MEMS, power ICs and 3D ICs, launched the newest member of its popular ProNova™ family of high- density inductively coupled plasma (ICP) reactors for the company’s DRIE series wafer processing products.

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The ProNova2™ is targeted for fast-growing 200-mm MEMS and 3D IC applications. It was built to out- perform the etch rates of comparative tools and deliver industry-leading DRIE productivity and yield benefits. In addition to demonstrating sustained high etch rates, the new reactor offers a three-fold impro- vement in ion uniformity. For some applications, the higher uniformity enables a 40-plus percent improve- ment in etch selectivity. The ProNova2™ also allows users to adjust selected etch parameters across the ICP reactor plasma and diffusion zones. This allows for better control of etch process performance across the wafer which boosts the silicon DRIE etch flexibili- ty needed for some advanced applications.

t SEMICON Japan, Tegal Corporation (NAS- DAQ: TGAL), an innovator of specialized

The first ProNova2™ tool has been installed in a Japanese development laboratory where it is meeting the performance expectations set by Tegal’s France- based R&D team. http://www.Tegal.com

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hermo Fisher Scientific Inc. (NYSE: TMO) has completed its previously announced acquisition

of Lomb Scientific, a well-known provider of labo- ratory chemicals, consumables and instruments in Australia and New Zealand.

Lomb Scientific has approximately 100 employees at its offices and warehouses in both countries, particu- larly in Sydney, Perth and Auckland. The company had full-year revenues of approximately AUD $34 million in 2009. Lomb Scientific will be integrated into both of Thermo Fisher Scientific’s business segments: Analytical Technologies and Laboratory Products and Services. http://www.thermofisher.com

CHF7.8 million from new and existing investors. BB Biotech Ventures and Merck KGaA were joined by new investors Sunstone Capital, Merck Serono Ven- tures and BioMedPartners. The Company plans to use the proceeds of the financing to progress its lead program VXM01 into and through clinical phase I testing. VXM01 is an investigational oral T-cell vaccine that is designed to elicit an immune re- sponse against vascular endothelium growth factor receptor-2 (VEGFR-2), a well characterized target for anti-angiogenic intervention. VXM01 targets the tumor vasculature and has shown anti-tumor activity in a variety of animal studies testing different tumor

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AXIMM AG, a Merck KGaA spin-off in Switzer- land, closed a private financing round totaling

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