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A Plasma FIB-SEM platform for deep sectioning and the highest resolution end-pointing for package level failure analysis


200 μm 1 mm cross-section of package substrate TESCANSOLARIS X


 Curtaining-free large-area cross-sectioning for physical failure analysis of advanced packaging technologies.


 Prepare large area FIB-cross-sections up to 1 mm wide.


 Obtain low noise, high resolution image at low keVs in short acquisition time at FIB-SEM coincidence with the sample tilted.


 Live SEM-monitoring during FIB milling for precise end-pointing.


 Observe the most beam-sensitive materials using low keVs ultra-high resolution for surface sensitivity and high material contrast.


 Effective techniques and recipes for fast and artefact-free cross-sectioning of composite samples (OLED and TFT displays, MEMS devices, isolation dielectrics) at high currents.


 Essence™ easy-to-use modular user interface 


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