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NanoFab SIMS


Figure 5: Mass spectrum from an aluminum-copper model alloy similar to the alloy used in the Wright Flyer crankcase. Elements detected related to aluminum alloy strengthening were Cu and Fe. Sample provided by Profs. Derk Joester and Kathleen Stair of the Material Science and Engineering Department, McCormick School of Engineering, Northwestern University, Evanston, IL.


Conclusion An inert-gas focused ion beam tool and a custom mag-


netic-sector mass spectrometer have been combined, enabling both high-resolution (< 1nm) SE imaging and high spatial resolution (∼10 nm) SIMS analysis and mapping within a sin- gle instrument. Te SIMS resolution was demonstrated on a standard-resolution test sample. An example of multimodal analysis combining SE imaging and SIMS elemental maps was shown in a metallurgical study.


Acknowledgements Te authors thank Dr. Tom Wirtz and colleagues of the


Luxembourg Institute of Science and Technology (LIST) and Dr. David Dowsett of Lion Nano-Systems for the long-standing collaborations that led to the development of the technology presented in this article. Te authors thank Profs. Derk Joester and Kathleen Stair of Northwestern University for providing the sample of the aluminum-copper model alloy.


Figure 6: Composite of elemental images from the model aluminum alloy similar to that found in the Wright Flyer crankcase. Composite was constructed by overlaying the iron and copper SIMS maps on the secondary electron (SE) image. Composite image shows copper-rich,


iron-rich, and mixed-element


precipitates (see text for details). Image width = 200 μm. Sample provided by Profs. Derk Joester and Kathleen Stair of the Material Science and Engineer- ing Department, McCormick School of Engineering, Northwestern University, Evanston, IL.


be some iron, but not copper, in solid solution with aluminum. Te copper map reveals the precipitate θ-Al2


Cu2 Fe precipitates can be Cu in the bound-


aries between the dendrites. Te iron map reveals some areas with finely structured iron-containing precipitates. Upon care- ful examination, needle-like ω-Al7


observed as features containing both copper and iron. Te SE image also appears to reveal some other darker gray unidenti- fied phases between and within the aluminum grains, thereby demonstrating the value of the multimodal imaging approach.


2019 May • www.microscopy-today.com


References [1] BW Ward et al., J Vac Sci & Tech B 24 (2006) 2871–74. [2] J Morgan et al., Microscopy Today 14(4) (2006) 24–31. [3] G Hlawacek and A Gölzhäuser, Helium Ion Microscopy, Springer, Basel, Switzerland, 2016.


[4] S Sijbrandij et al., J Vac Sci Tech B 28(1) (2010) 73–77. [5] FWM Rahman et al., Scanning 33 (2011) 1–6. [6] JA Notte, Microscopy Today 20(5) (2012) 16–22. [7] MG Stanford et al., J Vac Sci & Tech B 35 (3) (2017) 030802 1–23. [8] T Wirtz et al., Appl Phys Lett 101 (2012) 041601 1–5. [9] T Wirtz et al., “SIMS on the Helium Ion Microscope: A Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics” in Helium Ion Microscopy, eds. G Hla- wacek and A Gölzhäuser, Springer, Basel, Switzerland, 2016, pp. 297–323.


[10] D Dowsett and T Wirtz, Anal Chem 89 (2017) 8957–65. [11] S Sijbrandij et al., J Vac Sci Tech B 2(6) (2010) C6F6–C6F9. [12] P Hoppe et al., Geostand Geoanal Res 37(2) (2013) 111–54. [13] M Senoner et al., Anal Bioanal Chem 407(11) (2015) 3211–217. [14] FW Gayle and M Goodway, Science 266(5187) (1994) 1015–17.


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