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NanoFab SIMS


Figure 1: Photo of ORION NanoFab SIMS prototype. Operator console is on the left, and the primary beam column is on the right. The SIMS accessory is mounted on the left side of the column and occupies the center of the image.


and visualization functions for the SIMS include setting the analysis parameters, data-analysis options, and live display during acquisition for the three main data types: mass spectra, depth profiles, and elemental maps.


Mass spectrometer. Te front-end of the spectrometer,


consisting of the secondary ion extraction and transport optics, is retractable (Figure 2). When retracted, the system behaves and performs identically to a standard NanoFab system not equipped with SIMS. When inserted, the ion extractor is situated between the pri- mary ion beam column and the sample. A circular 500 μm diameter opening in the extractor allows the primary beam to pass through. Te sample is biased positively or negatively to provide the first accel- eration stage for the secondary ion beam, which is then deflected sideways toward the spectrometer. Te secondary beam then undergoes a second stage of accelera- tion and is transported to the spectrom- eter entrance by secondary ion transfer optics (Figure 2). Te spectrometer is in the familiar


Figure 2: Simplified schematic illustrating the operation of the mass spectrometer. See text for details. 24


double-focusing magnetic sector configu- ration and uses a water-cooled 0.75 mT (max) electromagnet. Te system employs five channel electron multipliers for ion detection. One detector is placed before


www.microscopy-today.com • 2019 May


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