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sliced into ultra-thin 25 micron layers. As each layer is removed, an optical scanner captures the newly exposed 2D profile at an extremely high resolution of 1 million pixels per square inch. Cutting and imaging is repeated until the part is consumed.

Visualize MEMS


The collection of 2D images is then processed to build a 100% accurate 3D point cloud that details exterior and interior geometries. The data can then be inspected, allowing verification of features that are both visible and concealed in the part geometry. Measurement repeatability is ±12.75 microns.

The conversion of raw scanned data into meaningful data sets is achieved through CGI’s Spec.Check software solution, which imports clean, accurate point cloud data from the scanner meaning that the entire scanned part can be precisely inspected and measured. Spec.Check allows for complete part analysis, mould qualification, process control and failure analysis.

While it is ideally suited to micro moulded parts, the CGI Pearl 700 machine can be used to analyse any product that fits within the 60 mm x 40 mm x 75 mm 3D scan envelope. The larger Pearl 900 machine has a scanning envelope of 85 mm x 65 mm x 150 mm.

The 3D scanner enables verification of CAD design intent and deviation cost- effectively and quickly, which makes a significant contribution to the design and manufacture of accurate and functional parts in a way that also allows for adherence to strict time-to-market requirements. Complete part validation can be completed in a matter of a few days.

Measuring MEMS Motion and Topography

Characterize and Optimize Your MEMS Device Performance

Fast, accurate and reliable optical testing of MEMS

Laser Doppler accuracy, pm re solu tion

Full field motion and surface topo graphy analysis

Fully automated, easy to use

Step inside the performance of your MEMS devices for a better under stan d ing of characteristics such as reso n ant frequencies, oper - ating de flection sha pes, settling times, me chanical crosstalk, envi - ron men tal per formance and reliability.

Key Areas of Application For many micro parts where there is a significant demand in respect of precision in design and production, CGI’s technology is ideally suited due to its applicability to complicated, tiny geometries. Any small deviations in part geometry introduced during the manufacturing process of micro parts can seriously affect product performance, and such deviations are often difficult to diagnose and resolve since they lie within moulded, assembled parts.

Use of conventional inspection tools cannot often successfully analyse and measure the dimensions of internal geometries due to the difficulty of quantifying internal measurements. So saying, if problems are detected or suspected after measuring sample parts from a moulding run, the mould is typically modified by removing only a small amount of steel because of limited inspection information. This conservative approach avoids taking away too much metal and therefore incurring the costs associated with scrapping a precise, expensive component of the tool. Samples can then be remoulded and examined again. This iterative process can often be difficult as well as costly, as product managers do not often have extra time for such procedures in their programme schedules. They are forced in effect to inch slowly towards a solution small step by small step.

To avoid such ‘guess work’ and gain greater insight into the precise geometries of complicated tiny parts, the CGI 3D cross-sectional scanner can be an especially useful technology.

The cross-sectional scanning technology provides first-article inspection of internal and external features from high-density point clouds as described above. The point cloud data can be compared with original 3D CAD designs through use of various software applications, which create a 3D colour map that visually depicts the variance of a moulded part from its design.

Polytec GmbH

76337 Waldbronn · Germany

Advancing Measurements by Light 28 | commercial micro manufacturing international Vol 7 No.3

Once such variance has been detected, the original 3D CAD design can be adjusted to fix any issues, focusing directly on re-iteration of design parameters that are critical to function, and allowing designers to ignore deviations that are not so critical. Tooling changes can be made accordingly,

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