Confocal Measurement Sensors


Designed for distance, displacement and thickness measurement tasks that require maximum precision, measuring virtually any surface including circuit boards, mirrored and glass surfaces, as well as liquids. Applications include R&D, laboratory & medical, micro machining, semiconductor manufacturing, glass & plastics production.


 Resolution from 10nm  400μm - 30mm measurement range  Up to 70kHz measuring rate


 Extremely small and constant spot size from 7μm


 Analogue, Serial, EtherCAT output


+44 (0) 151 355 6070 | www.micro-epsilon.co.uk | info@micro-epsilon.co.uk Contact Micro-Epsilon to see how our products can solve your measurement tasks.


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