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MEMS SOLUTIONS | ARTICLE


<< Figure 1: Mask. >>


Many industry-leading innovators have partnered with IntelliSense. As a matter of fact, IntelliSense’s industry client-base has grown by up to 200% on a yearly basis. Clients from several industries, including consumer electronics, medical devices, automotive sensors and many others have come to IntelliSense for its unique software and services.


Having its unique design and process simulation tools along with advanced process capability all under one roof, IntelliSense goes the extra mile to help clients deliver on time and within budget. For example, a local client required custom development of a high-temperature coefficient of resistance (TCR) deposited nickel process, which was to be employed in a special flow sensor. IntelliSense performed the key component design (mask and analysis) before fabrication (figures 1 and 2).


<< Figure 2: Process model of key structure. >>


Then, IntelliSense engineers developed a process that successfully delivered the target high TCR (higher than 5000 ppm/K) device. Figure 3 shows an area of the fabricated chip. The team later packaged the chip and delivered test reports to describe the chip’s performance over a large temperature range. This was done using in-house test equipment (figure 4).


40 | commercial micro manufacturing international Vol 7 No.2


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