MICRO METROLOGY | ARTICLE
Even
Sharper Optical Measurement of Smallest Micro Structures, Edge Radii and Roughness values
The optical method of ‘phase measuring fringe projection’ captures entire surface areas in a single three- dimensional, high-resolution image and allows for a comprehensive form evaluation within only a few seconds.
Digital projection and UV technology enable the new MikroCAD Plus to measure micro structures and geometries down to the sub- micron scale. A remarkable innovation with this instrument is the measurement using a UV light source whose distinct properties offer many advantages, especially with critical surfaces such as those that are glossy, concave or highly sloped. The shorter illumination wavelength together with a 5 megapixel camera, allows to attain levels of exceptionally high resolution enabling the instrument to easily measure form, roughness, wear, layer thickness, as well as tool cutting edges down to radii of less than 1 micrometre.
Optical measurement yields advantages in many areas, especially against tactile methods, which rely on mechanical testing by a specifically produced test stylus. These allow only a single line of measurements, and the stylii are expensive and subject to wear and damage. The radius of the test stylus has to be compensated for by special algorithms, which limit their applicability. The optical method of ‘phase measuring fringe projection’, however, captures entire surface areas in a single three-dimensional, high-resolution image and allows for a comprehensive form evaluation within only a few seconds. With cutting edge measurement, for example, radii are determined for any single point on the edge, by automatically laying several hundred virtual section planes perpendicular to the edge. With roughness measurement as well, a large amount of data can be captured and analysed in a very short time. In addition to substantial time savings, zero operating costs delivers a great return-on-investment (ROI) advantage, far outweighing the initial investment.
5 million points measured at once The MikroCAD Plus by GFM relies on the principle of area-based fringe projection, by using digital micro mirror displays (DLP). This speciality of GFM allows for an exceptionally fast and precise surface form and structure measurement. 5 million points on a three-dimensional surface are captured simultaneously and for the entire height range, yielding in a precise and detailed result within a few seconds, hence allowing for a very effective workflow.
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17 | commercial micro manufacturing international Vol 7 No.2
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