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With the Hybrid Hexapod, axes can be optimised for range of travel and cost. For example, XY travels of over one meter can be paired with any tripod sub-assembly. The yaw rotary stage can have limited travel or 360 degree continuous rotation. The yaw rotary stage can be optimised to have less than one micrometer runout. The overall flexibility of the concept allows for a myriad of efficiently configured assemblies to fit any and all six degree of freedom motion system applications.

Visualize MEMS

a b operation

Summarising the Hybrid Hexapod Advantages Conventional hexapods are commonly used, and have their place in applications requiring 10s of microns of precision, but they do not meet the high-precision motion requirements of 6-D Nano Precision applications. 6-D Nano Precision is a term used to describe motion systems with verifiable nanometer order motion performance for all six degrees of freedom of a body in motion. The patent-pending Hybrid Hexapod was developed with the 6-D Nano Precision concept at the forefront of every decision. It combines precise serial XY and rotary (i.e. yaw) stages with a novel parallel kinematic tripod design to provide six degrees of freedom of motion at performance levels two orders of magnitude beyond current traditional hexapods. The accuracy, repeatability, stiffness and geometric accuracy performance makes the Hybrid Hexapod the ideal motion solution for many leading nanotechnology companies in the optical, semiconductor, manufacturing, metrology, laser processing and micro machining industries. The Hybrid Hexapod continues to open up a new realm of possibilities for 6-DOF motion systems.

Nathan Brown is Vice President of Engineering for ALIO Industries. He has extensive experience with the design, development, manufacturing and testing of next-generation precision motion systems. He continually strives to innovate by finding creative solutions to complex problems. He holds a degree in Mechanical Engineering from the University of T Austin, US.

exas at


Polytec GmbH

76337 Waldbronn · Germany

Advancing Measurements by Light 25 | commercial micro manufacturing international Vol 7 No.2

Measuring MEMS Motion and Topography

Characterize and Optimize Your MEMS Device Performance

Fast, accurate and reliable optical testing of MEMS

Laser Doppler accuracy, pm re solu tion

Full field motion and surface topo graphy analysis

Fully automated, easy to use

Step inside the performance of your MEMS devices for a better under stan d ing of characteristics such as reso n ant frequencies, oper - ating de flection sha pes, settling times, me chanical crosstalk, envi - ron men tal per formance and reliability.

<< Figure 3: (a) Force applied laterally on a hexapod link. (b) Force applied laterally on a Hybrid Hexapod tripod link. >>

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