THE GAME CHANGER for Semiconductor Manufacturing


Introducing GF135, the revolutionary new PTI mass fl ow controller that tests accuracy in real time.


The new GF135 delivers revolutionary technology that will set new standards in semiconductor manufacturing. The GF135 provides smarter functionality with real-time, integrated rate-of-decay fl ow measurement. Patent-pending fl ow error detection technology and advanced diagnostics verify accuracy, check valve leak-by and monitor sensor drift – all without stopping your production.


You are no longer limited to fl ow checks once per month, per day or even per hour. The GF135 can verify fl ow at every step change or more frequently if desired, so your process keeps running and your wafers meet QA specs.


That means you improve your process yield, uptime and your bottom line. In fact, an increase in wafer yield of only 1% could result in $60,000 in savings per day!


Learn what the GF135 performance can do for you. Visit www.BrooksInstrument.com for details.


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42