Instrumental in change Leading plasma process innovation
Oxford Instruments Plasma Technology is turning smart science into world class products with its flexible systems for precise and repeatable etching, deposition and growth of micro and nano structures
Plasma Etch & Deposition Atomic Layer Deposition Ion Beam Etch & Deposition Deep Silicon Etch
For more information, please contact Oxford Instruments Plasma Technology: Tel: +44 (0)1934 837 000 Email:
plasma@oxinst.com
www.oxford-instruments.com/plasma
PLASMA
Transfer Gates Door
Insert Valve Outstanding choice
Sizes from SEMI standards up to 150 x 1250 mm
Bellows sealed or shaft sealed actuators
Options such as surface coatings, heaters, different sealing materials and more
Made to fit your requirements
Swiss Headquarters Tel ++41 81 771 61 61
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www.vatvalve.com R021_034_075_Ad_YI0603EA_210x140.indd 1 15.01.08 17:16:23
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