NEWS REVIEW
Oxford Instruments awarded patent for plasma film deposition
OXFORD INSTRUMENTS says plasma enhanced deposition processes typically decrease the deposition temperature, compared to chemical vapour deposition processes driven by heat alone. Using a high density plasma source offers a significant decrease in processing temperature for the same quality material, and can deposit silicon dioxide layers below 1000C. This development opens up this style of plasma processing to a new range of substrate materials including polymers.
The European patent EP1889946B1 cites Thomas, Griffiths and Cooke as inventors, and discloses a method of optimising uniformity over larger areas using a plasma transmission plate.
This technique has been used in more than 25 tools shipped by Oxford Instruments since the patent application
was filed. Oxford Instruments Plasma Technology’s CTO Mike Cooke says, “The grant of this patent covering high density plasma assisted thin film deposition is part of a broad platform of intellectual property rights which continue to be developed by our company. Oxford Instruments now has multiple patents, and we believe that this intellectual property reinforces our influential position in the plasma technology field.”
Oxford Instruments Plasma Technology are leaders in the manufacture of flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures.
The company’s systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.
Silicon threatens to muscle in on III-V devices
DEVICE REVENUES for gallium arsenide (GaAs), a compound semiconductor, grew slightly from 2011 to 2012. The primary drivers for the increase were in handset growth, particularly smartphones. Strategy Analytics maintains that although Skyworks and WIN Semiconductors remain at the top of this market, the silicon threat is looming.
According to the market research firm’s “GaAs Device Industry Closes up in 2012” report, the silicon device market has seen recent developments which could compete with GaAs device revenues in the immediate future.
In the short-term, revenue in the GaAs device market is expected to exceed the historical average. But in the longer term, it is expected that recent developments in CMOS multi-mode, multi-band handset PAs from Qualcomm and others will pose a significant threat to the GaAs device market.
“Smartphones continue to grow faster than the overall handset market. This growth, coupled with more bands and increased GaAs device content remains the single biggest driver for revenue growth in the GaAs device market,” notes Eric Higham, Director of the Strategy Analytics GaAs and Compound Semiconductor Technologies Service (GaAs). “In the short-term, we anticipate this combination of factors will drive GaAs device revenue growth above historical averages.”
Asif Anwar, Director, Strategy Analytics Strategic Technologies Practice, adds, “Strong growth in the last quarter of 2012 provides a good starting point for the GaAs industry in 2013.
However, recent announcements about CMOS multi-mode, multi-band PAs and envelope tracking will threaten the GaAs device market and these developments will be monitored closely.”
10
www.siliconsemiconductor.net Issue I 2013
Watlow acquires Semiconductor Tooling Services
WATLOW, a designer and manufacturer of complete thermal systems, has acquired San Jose, California-based Semiconductor Tooling Services, Inc. (STS) as a wholly-owned subsidiary. The terms of the agreement will not be disclosed.
STS’ primary offering is the development and application of precision bonds between critical components in a process tool assembly. These bonds are responsible for adhesion, as well as to provide specific heat conducting properties.
The acquisition will allow Watlow and STS to provide its shared customers a greater product offering. and increased capabilities.
“We are pleased that STS is now a part of Watlow because it helps us provide even more value to our semiconductor customers. One of Watlow’s goals is to improve our domain knowledge and elevate our technical expertise in our strategic markets,” says Tom LaMantia, Watlow’s president.
“We fully support this acquisition,” adds John Lilleland, owner of STS. “We have worked with Watlow for many years and have developed a mutual respect. Our complementary capabilities and mutual strengths will allow us to provide industry- leading solutions for our customers.” Watlow designs and man ufactures industrial heaters, temperature sensors, controllers and supporting software as well as assemblies - all of the components of a thermal system.
The company partners with its customers to optimize thermal performance, decrease design time and improve efficiency of their products and applications. Watlow brings its experience to numerous industries, including semiconductor processing, and environmental chambers.
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