Highlighting the advantage The brightest processes and tools for HBLEDs


Oxford Instruments Plasma Technology has developed systems for Etch or PECVD, offering very high throughput, excellent uniformity and superb repeatability, as well as industry leading batch size.


PlasmaPro NGP1000


PLASMA www.oxford-instruments.com/plasma


For more information, Oxford Instruments Plasma Technology: Tel: +44 (0)1934 837 000 Email: plasma@oxinst.com


Reduce Greenhouse Gas Emissions


Fluorinated High Boiler Grades 170°C to 270°C


Using a High Boiler Reduces • Product Consumption • Emissions into the Atmosphere • Maintenance Costs


Galden® PFPE Inert Heat Transfer Fluids www.lesker.com 11-186


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