Advertorial
Spectroscopic Ellipsometer
SpecEL-2000-UV-VIS-NIR THE SpecEl-2000-UV-VIS-NIR is a user-friendly, bench-top Thin Film measurement system utilising Spectroscopic Ellipsometry. Ideal for flat, semi-transparent samples such as wafers and glass plates, the Spec-El-2000 is designed to be an affordable, compact and convenient system, featuring simple placement of the sample and one button operation. Spectroscopic ellipsometry measures relative changes in the phase and amplitude of the light instead of absolute intensity (reflectometry). This technique is therefore independent of any reference measurement and multiple parameters can be determined simultaneously. Measurements of thickness as well as refractive index (n) and absorbance (k) data for the wavelength range 300-1000nm are delivered within 7-13s.
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Half the price of standard ellipsometry equipment, the Spec-El-2000-UV-VIS-NIR features an integrated broadband light source, guiding optics, a rotatable polarizer, the sample table, a second rotating polarizer (analyser), further optics and finally a miniaturized spectrometer with a CCD array as a detector. The incidence angle is nominally set to 70°, but can be customer specified to any angle between 65° and or 75°. The desktop footprint is extremely small (52 x 33 x 24cm). Depending on the layer and substrate material, the SpecEl can detect layer thickness between 1nm and 10µm, and gives values for thickness accurate to 0.1nm. The system comes with a 32-bit Windows PC as standard, complete with powerful software offering a range of modelling possibilities such as Cauchy, OJL, Tauc-Lorentz, Drude, EMA and different types of oscillator. The software also stores specific measurement routines, reducing the tedium of repetitive measurements and easing integration. The standard beam diameter is 400 – 1200 µm. Further options include reference wafers and 2D mapping accessories, with custom, multi-functional solutions available on request.
» Wavelength range 250 – 1050 nm » For layers from 10 nm up to 100 µm » Measure up to 10 layers
» Film thickness of transparent or semitransparent materials
11-13 October 2011 - Stand 1.511
www.oceanoptics.eu Tel: +49 711 341696-0
www.euroasiasemiconductor.com Issue IV 2011
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