Effect of the Silicon Drift Detector
Acknowledgements Te author would like to acknowledge the contribution of
all his EDAX colleagues, past and present, who have supported the development of experimental data and participated in the discussion of algorithms for this work.
References [1] F Eggert, IOP Conf Ser.: Mater Sci Eng 7 (2010) 012007. [2] F Eggert, Microchim Acta 155 (2006) 129–36. [3] J Heckel and P Jugelt, X-Ray Spectrometry 13 (1984) 159–65.
[4] F Eggert, Experim Techn Physik 33 (1985) 441–48. [5] F Eggert et al., IOP Conf Ser: Mater Sci Eng 304 (2017) 012005. [6] CG Ryan et al., Nucl Instrum Meth B 34(3) (1988) 396–402. [7] F Eggert and W Scholz, Phys Stat Sol 97 (1986) K9–K13. [8] WT Elam et al., Powder Diffr 25(2) (2010) F13. [9] J Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, Tird Edition, Springer, New York, 2003.
Figure 6: Error histogram for 269 PeBaZAF results showing the relative deviations from the true compositions. The central (largest) bar gives the number of results within the deviation range of from 0% to 5% of the true composition [14].
of different multi-element specimens, the PeBaZAF method yields 95% of the results within ±13.7% of the known com- position. Tis is better than certain other standardless meth- ods. Te eZAF method should gain improved accuracy from a stored database of standards measurements.
[10] G Love and VD Scott, J Phys D: Appl Phys 11 (1978) 1369–76. [11] DA Sewell et al., J Phys D: Appl Phys 20 (1987) 1567–73. [12] WT Elam et al., Radiat Phys Chem 63(2) (2002) 121–28. [13] F Eggert and J Heckel, Experim Tech d Physik 34 (1986) 3, 201. [14] F Eggert, Microsc Microanal 24 (Suppl 1) (2018) 201. [15] M Wendt Krist Tech 13 (1978) 1259–75. [16] F Eggert, Microsc Microanal 25 (Suppl 2) (2019) 560–61. [17] J Goldstein et al., Scanning Electron Microscopy and X-Ray Microanalysis, Fourth Edition, Springer, New York, 2018.
[18] DE Newbury and NWM Ritchie, J Mater Sci 50 (2015) 493–518.
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