Instrumental in change Leading plasma process innovation
Oxford Instruments Plasma Technology is turning smart science into world class products with its flexible systems for precise and repeatable etching, deposition and growth of micro and nano structures
Plasma Etch & Deposition Atomic Layer Deposition Ion Beam Etch & Deposition Deep Silicon Etch
For more information, please contact Oxford Instruments Plasma Technology: Tel: +44 (0)1934 837 000 Email:
plasma@oxinst.com
www.oxford-instruments.com/plasma
PLASMA A PASSION FOR PERFECTION
Magnetically Levitated Turbopumps
HiPace™ M n Extremely simple installation – 360° installation orientation n Long service life and reliability – automatic out-of-balance compensation and patented, cycled venting n Innovative bearing system – extremely low vibration, quiet operation and low dynamic magnetic stray field
Are you looking for a perfect vacuum solution? Please contact us:
Pfeiffer Vacuum GmbH · Headquarters/Germany T +49 6441 802-0 · F +49 6441 802-1202 ·
info@pfeiffer-vacuum.de ·
www.pfeiffer-vacuum.com
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