packaging chips
Item Number of pumps
Periodic checks Routine pump check Service person’s wage Cost for checks
Figure 2b. iXL120 Vacuum Pump
Consider the assumptions shown in Table 1. Using the assumptions given, it can be seen that routine checks would cost a company $60,833 (€47,388.91) per year. If the data is analyzed and discussed, it can cost $10,920 (€8,506.68) per year. The higher costs come from an unplanned event that results in lost production. If five unplanned events occur per year, and it is assumed $1,000 (€779.00) can be earned per wafer, the unplanned events can add up to $1,000,000 (€779,000.00) of loss production per year excluding the cost of any lost wafers.
Although the price per wafer that can be earned varies greatly by product produced, even a value of $500 (€389.50) per wafer still results in a significant savings if computer monitoring can reduce the amount of unplanned downtime. Evidence suggests that making use of on-board monitoring capability within leading edge vacuum pumps can only be beneficial. In order to realize these benefits, it is important to select vacuum pumps, such as turbo- molecular pumps, from a single vendor to ensure seamless connection to a dedicated monitoring system.
Data review and analysis Analysis time
Collation / summary Analyst wage
Cost for analysis
Pump replacement analysis Time to replace
Tool preparation time Unplanned times Downtime per year
Process tool & wafer price Tool throughput
Price per wafer earned Table
1.Model Assumptions
In conclusion, advances in semiconductor packaging are happening today. Tomorrow, greater complexity involving semiconductor vacuum-based processing will pose a challenge. Using advanced vacuum products from experienced companies will help reduce operational costs, especially if features built-in to the products can be used to advantage.
© 2012 Angel Business Communications. Permission required.
Assumption 100
5 min / pump $20 / hr (€15.58) $60,833 / year (€47,388.91)
2 hr / week 1 hr / week
$70 / hr (€54.53) $10,920 / year (€8,506.68)
2 hr 2 hr
5 / year 20 hr / year 50 wafer / hr $1,000 (€779.00)
Figure 3 (a) Example of Edwards Fabworks equipment monitoring scheme.(b) Example of data monitoring used for predictive failure analysis
Issue IV 2012
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