Lesker Valves Rectangular Valve Issues?
KJLC Rectangular Gate Valves are the solution. No spring actuation means low-particulate generation!
www.lesker.com 12-023 Kimura Adverts2_Layout 1 23/05/2012 09:20 Page 1 DISCOVER...
How to:- • Increase CVD and Etch equipment productivity. • Reduce life-time cost of seals. • Minimize particulation in sub 45nm feature sizes and beyond.
®
A unique range of fully organic elastomers for semiconductor sealing applications which demand extreme plasma resistance.
A Unit of
Click :
www.prepol.com/kimura Visit : Booth #2013
Call : 408 441 2043
Booth #2013
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