Pendulum Control Valves Series 65.0 / 65.1 for downstream pressure control


Efficient High wafer throughput and yield based on fast and accurate response


Compact Control and isolation valve with integrated control unit


Simple Easy to maintain


Series 65.1 with extended control range


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www.vatvalve.com R650_R651_Ad_YI0501EB_210x140.indd 1 15.01.08 17:40:06 Reduce Greenhouse Gas Emissions


Fluorinated High Boiler Grades 170°C to 270°C


Using a High Boiler Reduces • Product Consumption • Emissions into the Atmosphere • Maintenance Costs


Galden® PFPE Inert Heat Transfer Fluids www.lesker.com 11-186


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