NetNotes
samples are flat and clean, this shouldn’t make too much difference. Jon Barnard
jsb43@hermes.cam.ac.uk Fri Jun 17
TEM:
EDX and magnetic parts We have an SDD EDX system on our TEM and routinely get Co,
Cu, and Fe in the spectra. I understood that these elements are from the polepiece and other components in the sample area. When a student submitted a manuscript with these elements in the spectrum, along with the other elements of interest (In, Sb), a reviewer said that the TEM instruments are strictly restricted from using the magnetic impurities/ parts, so there must be other sources for iron. Comments? How would you respond to this reviewer? Debby Sherman dsherman@purdue. edu Wed Jun 22 While the Fe, Co, etc. are undoubtedly from the pole-piece, I
wonder why you see such a significant contribution to the spectrum. As long as the objective aperture is out, even the scattered electrons should go down the bore of the pole-piece. Bremsstrahlung from the condenser apertures may have some effect, but it should be small. Analytical scopes have improved dramatically over the years and I thought stray signal was pretty much a thing of the past. Pretty much every microscope I’ve used in the past 25 years has almost no X-rays from the p-p. Do you have an unusual scope? You can reply off-line if you don’t wish to identify the scope publicly. In my experience, the EDX collimators on TEM detectors don’t shield very much, so the improvements in stray signal have been due to changes in the column itself. Henk Colijn
colijn.1@osu.edu Tu Jun 23 I agree with Henk that you should not see the elements from
the p-p if the detector geometry is optimized. You need to request for service to figure out where is the problem. Normally the possible
spurious source is the grids if you use, as well as the specimen holder when it is translated far way from its zero position. Zhiping Luo
zhiping_luo@hotmail.com Sat Jun 25
SEM:
stigmation We have a Hitachi S4700. Last year it started to have stigmation
issues. Te leſt stigmation would peg out and we were not able to focus past 5000×. Tis was on every sample, in fact magnetic samples tend to do a bit better with stigmation. Te problem gets worse the longer we use the scope. To date the service persons have rebuilt the column, installed a new source, replace the objective lens (or the bottom unit if you don’t want to consider it an objective lens). We are waiting on the bottom cover of the polepiece, this might take some time considering it will be coming from Japan. I was wondering if anybody else has had this issue and if so was it every corrected. Clarissa Wisner
cvierret@mst.edu Tu May 5 You didn’t mention whether or not the engineers have looked
at the signal going to the stigmator coils. If they haven’t, have them do that. In my experience on other brands if there is noise on the signal at under 500 kHz with an amplitude over about 10 mV, you can have uncorrectable astigmatism. Ken Converse kenconverse@
qualityimages.biz Tu May 5 I’ve never experienced this problem on my SEM and don’t recall
ever seeing any posts associating it with Hitachi SEM’s. I’ve used an S-4700 for the past 9 years so I pay pretty close attention to posts associated with Hitachi. I recently had a stigmation issue with mine but it was related to sample material migrating to the BSE detector. A quick cleaning and we were back on line. John A. Robson john.
robson@boehringer-ingelheim.com Fri May 6
Custom apertures Aperture strips Beam acceptance apertures
FIB consumable replacement parts Extractors Suppressors
Large area plasma FIB milling service work
Oregon Physics LLC, 2704 SE 39th Loop, Suite 109 Hillsboro, OR 97123 USA
oplab@oregon‐
physics.com www.oregon‐
physics.com Tel/FAX: +1‐503‐601‐0041
74
www.microscopy-today.com • 2011 September
Vias fabricated at IMEC while developing their fabrication process.
Plasma FIB cross‐sectioned and imaged at Oregon Physics.
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