Oxford Instruments
Advanced Process Tools for Etch, Deposition and Growth
Leading edge, flexible systems for precise, controllable and repeatable
etching, deposition and growth of micro and nanostructures
Great uniformity, high throughput and extensive process library
Plasma Etch & Deposition
Atomic Layer Deposition
Ion Beam Etch & Deposition
Nanoscale Growth Systems
Hydride Vapour Phase Epitaxy
For more information, please contact Oxford Instruments Plasma Technology:
Tel: +44 (0)1934 837 000 Email: plasma@oxinst.com
www.oxford-instruments.com/plasma
Why should you use an
electron beam lithography
system from Vistec?
Based on our broad experience gathered
over many years of developing, manufacturing
and world-wide servicing field-proven electron
beam lithography systems a team of
highly-motivated employees, excellent
researchers and high-quality engineers is
constantly doing their best to fulfil our
customers’ requirements.
Your Dedicated Performance Partner
for Electron Beam Lithography
Vistec Electron Beam Lithography Group I www.vistec-semi.com
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