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RADIANCE
Flexible cluster platform architecture
RADIANCE - FOR WHEN COMPROMISES WONT DO!
With a choice of “Single” and “Multi-process” modules confi gured just the way you
want, the Radiance cluster tool puts you fi rmly in control for development and mass
production. Direct or indirect wafer handling, cassette to cassette transport for simple
line integration and a choice of Sputter, PECVD, RIE and ICP process technologies
means there is an ideal Radiance solution whatever your manufacturing challenge.
Evatec - The Thin Film Powerhouse
Headquarters Tel: +41 81 720 1080
Now featuring Corial plasma technology
www.evatecnet.com
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