business interview
rhombus4
What we’ve been doing quite actively over the last few years is to develop several
larger style bubblers. We introduced a 7.3 Kg TMGa (Trimethyl Gallium) bubbler four or
five years ago, which is offered with a heat exchanger that can be put in the existing
cabinet of the tool. That bubbler brought us quite a lot of success
in this industry we still have a way to go in recognizing the There is also a growing interest in bulk central delivery
hazards of these chemicals. To some extent clean room systems, particularly in new fabs. We are able to offer
practices that are important for dust control conflict with such systems to our customers, building on our
what you would like to see from a metal alkyl safety experience with bulk delivery of DEZn TCO.
perspective. If we transfer metal alkyls at our plant, we
wear aluminized suits. This may seem overdone, but it is
the only thing that really protects you against leakages. Of Q
What do else your customers want from you?
course, we handle larger amounts, but this practice hasn’t
really progressed into that of our users.
A
If we focus on the LED sector, then our customers
want to grow their LED business, which operates in
Q
There seems a trend towards the production of a competitive environment. They need a very reliable
larger and larger bubblers. Do you agree? supply of the MO sources, and quality consistency is also
important. We believe that our relatively large batch sizes
A
That is absolutely true. What we’ve been doing quite help in providing relatively good quality consistency.
actively over the last few years is to develop several
larger style bubblers. We introduced a 7.3 Kg TMGa In the end, pricing is always high on the agenda, and our
(Trimethyl Gallium) bubbler four or five years ago, which is major task is to keep supplying these chemicals at
offered with a heat exchanger that can be put in the competitive prices. However, we also keep investing in
existing cabinet of the tool. That bubbler brought us quite bubbler innovations. We have the Hiperquad and
a lot of success. Hiperloop systems for TMIn (Trimethyl Indium) delivery,
that have a very stable flow and very high source
We have now taken this one step further with the recent utilization.
introduction of a 20 Kg bubbler. This can be used either
in a central delivery set up, or directly in the tool, so we Typically, the TMIn flow drops off after 80 percent
also adapted our heat-exchanger to fit this larger bubbler. consumption. With these systems - which can increase
the contact time between the carrier gas and the TMIn -
As the bubbler gets bigger, it gets harder to fit it into the the bubbler can be used up to 98 percent, and only then
cabinet. But we are working with a company called Noah does it drop off. In that range we now offer two bigger
Precision, which offers advanced thermo-electric chillers. sizes: 750g and 1500g.
They have a very small footprint, they avoid the use of the
traditional open water baths, and they deliver very good An addition is a Hiperflo bubbler, a liquid bubbler
temperature control with low maintenance. What we try technology that builds on the TMIn bubbler technology.
and do with our new, larger-scale bubblers, is to offer the We enhance the flow out of the bubbler, so it gives higher
option that our customer buys it with a customized chiller. source utilization, and it allows faster growth, which is
This enables them to put even larger bubblers in the especially evident in lower vapor pressure sources like
cabinet. TEGa (Triethyl Gallium).
Michiel Floor, AkzoNobel’s Global Business Manager for high-purity metalorganics,
has a doctorate from Delft University, NL, in Chemical Technology.
He has been with AkzoNobel for 20 years, and first worked in metalorganics
research and development at the Deventer labs in NL.
He has helped to market and develop the company’s catalysts and metal organics,
and has previously held the position of Commercial Manager in organic peroxides
and polymer additives
40 www.compoundsemiconductor.net November / December 2009
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