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Real GaN temperature with Pyro 400
At the International Conference on Nitride shows that wafer bowing causes changes in
Semiconductors (ICNS) in Korea in temperature distribution and proves that the
October LayTec presented a product, the center of concave bowed wafers is hotter.
Pyro 400, they claim is the first real
solution for measuring the exact surface Dr. Haberland also reported that the real
temperature of GaN layers. surface temperature of GaN is sensitive to
changes of carrier gas, rotation speed, and
Unlike conventional infrared pyrometry, reactor pressure.
which can only detect the susceptor
surface temperature under sapphire or SiC These deviations cannot be detected by
wafers, Pyro 400 performs pyrometry at conventional infrared pyrometry
400 nm. At this wavelength GaN emits light measurements at all.
and makes it possible to measure its provides direct access to the GaN There are no emissivity oscillations during
temperature. temperature distribution across each wafer GaN buffer growth, which makes Pyro 400
in a planetry reactor. an ideal tool for temperature feed-back
At the ICNS Dr. Kolja Ha-berland of LayTec control application.
presented the results obtained during Together with the complementary
growth of GaN LED structures containing reflectance and curvature data measured by Pyro 400 provides a new quality of
multi quantum wells (MQW). Pyro 400 EpiCurve, the in-situ measurements give all temperature measurement with an accuracy
monitored the temperature profile during a important information needed to optimize and will be of benefit in GaN based LED
full revolution of the susceptor. The data uniformity and LED performance. The data and laser production in the future.
Green GaN amplifier modules
RF Micro Devices has released the The performance of this new family of CATV Bob Van Buskirk, president of RFMD's
industry's first "green" gallium nitride (GaN) amplifiers is on par with other industry- Multi-Market Products Group (MPG), said,
based CATV amplifier modules. The leading GaAs CATV Power Doublers, also "Network operators worldwide are
modules are designed for use as power supplied by RFMD, but with 20% lower increasingly focused on reducing the energy
doubler amplifiers in current and next current consumption (24V/380mA). costs of operating their wireless and
generation CATV infrastructure applications. wireline networks.
With these "green" energy-saving benefits,
The devices are hybrid power doubler these products enable designers to fulfill He continued, "RFMD's high-performance
amplifier modules designed to provide the growing requirements for lower energy GaN technology satisfies the industry's
final amplifier stage for CATV trunk consumption and assist network operators drive for "green technology" by enabling
amplifiers, line extenders, and optical nodes. in their drive to reduce the overall cost of advanced RF components and products
The parts employ GaAs pHEMT and GaN operating CATV networks. Reducing costs that provide industry-leading power and
HEMT die and operate from 45 MHz to has always been a key goal for the industry operate at significantly lower power
1000 MHz. as it ensures better and cheaper products. consumption levels."
Plasma-Therm announces etch system sale to III-V foundry
Plasma-Therm has announced the sale of a integrated EndpointWorks for accurate and requirements from R&D through high
multi-module etch system to a major III-V repeatable endpoint process control. volume production.”
foundry. To meet capacity requirements, the
system is configured with three chambers “We are pleased to continue our expansion Plasma-Therm LLC is a U.S. based plasma
for GaAs via etch process resulting in high into the high production sector and process equipment supplier that serves
productivity. Additionally, the VERSALINE demonstrate our process performance and various specialty markets including
ICP modules feature actively controlled superior cost of ownership,” said Ed photomask, solid state lighting, thin film
source heating which enables a stable Ostan, Executive Vice President of Sales & head and compound semiconductor.
process environment and reduces Marketing at Plasma-Therm. “The modular Plasma-Therm LLC has the largest installed
downtime due to maintenance. These approach of the VERSALINE platform etch equipment base in the GaAs wireless
process modules incorporate fully offers versatility that meets customer sector.
November / December 2009 www.compoundsemiconductor.net 15
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