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Test & measurement


The key to advanced precision measurement and control


Beijing U-Precision Tech Company, a manufacturer of equipment for high- precision industrial processes, recently approached engineering technologies company Renishaw to use its TONiC optical encoder systems in the advanced semiconductor equipment and motion stages of its process machinery.


S


emiconductor demand has grown continually in recent years due to the rapid development of new technologies


such as artificial intelligence (AI), 5G broadband networks, and Internet of Things (IoT). Equipment manufacturers have gradually stepped up investment in the development of new models to cope with the formidable challenges posed by high-precision advanced manufacturing processes. Key process equipment for semiconductor manufacturing includes dual wafer stages for photolithography, wafer bonding equipment, advanced laser annealing equipment, and equipment front-end modules (EFEMs). Beijing U-Precision Tech Co (U-Precision) is a


leading manufacturer of equipment for high- precision industrial processes. Its advanced semiconductor equipment and motion stages use Renishaw's high-performance TONiC optical encoder systems. U-Precision's products are primarily aimed


at the semiconductor and precision manufacturing industries and include both whole units and major mechanical measurement and control components, but motion stages account for approximately two thirds of the company's overall revenue.


28 March 2021 Instrumentation Monthly


The ChalleNge The design of semiconductor process equipment is extremely challenging in terms of both component specifications and the precision of measurement and control systems. Manufacturing equipment must also be price competitive whilst meeting the demands of the latest chip innovations such as the 10 nm and 7 nm MOSFET technology nodes. Sun Guohua, president of U-Precision,


explains: “U-Precision has been involved in the


development of wafer stages for photolithography since it was founded. We are currently the only Chinese company, and only the second company globally, to master the essential technology for dual wafer stages. The wafer stage is one of the two main components of a photolithography system [the other being EUV exposure systems], and the associated technology is extremely demanding in terms of motion control. We have developed our own technology in key areas including


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