www.parksystems.com Better inVacuum


Park NX-Hivac AFM www.parksystems.com/nx-hivac


High Vacuum Advantages for Electrical Atomic Force Microscopy [AFM]


• higher accuracy, resolution and repeatability in high vacuum compared to the ambient conditions


• increased sensitivity of current signal when performed in high vacuum


• control of contact force and time via PinPointTM mode for higher accuracy and resolution in electrical measurements


• longer tip lifetime and reduced sample damage due to the elimination of frictional force when performed in PinPointTM


mode


• available on Park NX-Hivac for Scanning Spreading Resistance Microscopy [SSRM] and conductive AFM [C-AFM]


MoS2 www.parksystems.com/nx-hivac Parks Systems Europe I Janderstrasse 5, Mannheim, Germany I www.parksystems.com I pse@parksystems.com I 0049 621 490 896 50 Air


3 nm 0


High Vacuum 0 0 sample measured with C-AFM on NX-Hivac. Image courtesy: IMEC, Leuven, Belgium 0 3 µA topographyTopography 2 nm current Current 3 nA


high vacuum


air


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