Company Profile 3D-Micromac AG
3D-Micromac AG is the industry leader in laser micromachining. We develop processes, machines and turnkey solutions at the highest technical and technological level. Our aim is to provide superb customer satisfaction even for the most complex projects.
3D-Micromac delivers powerful, user-friendly and leading edge processes with superior production efficiency. 3D-Micromac systems have been successfully implemented in various high-tech industries worldwide. Tis includes semiconductor, photovoltaic, glass and display industry, microdiagnostics, as well as medical device technology.
In the area of sample preparation, 3D-Micromac has developed the microPREP™ PRO system that provides efficient laser-based preparation to a broad range of microstructure diagnostics techniques.
microPREP™ PRO
With microPREP™ PRO material samples can be prepared effectively and economically. microPREP™ PRO allows the creation of complex and 3D-shaped samples. Tus, it enables more comprehensive analysis of certain structures like in advanced packages, such as through silicon vias (TSVs), or even complete systems-in-package (SiP).
Furthermore, microPREP™ PRO is ideal to provide larger-sized samples with micron-level precision. Te integrated overview camera assists in navigating on larger samples - the high- definition process camera allows for exact positioning.
Te application of a pico-second laser ensures virtually no structural damage and no elemental contamination of the material. In addition, microPREP™ PRO’s novel approach features substantially higher ablation rates than purely ion-beam-based processes.
Advanced features of the microPREP™ PRO include: - Recipe-driven soſtware for fast and easy sample preparation - Loading any kind of geometry into the system - Motorized stages to find the area of interest as fast as possible - CO2
next step
Te microPREP™ PRO system was developed to provide efficient laser sample preparation fitted to the needs of microstructure diagnostics and failure diagnostics. microPREP™ PRO enables laser-based sample preparation of metals, semiconductors, ceramics, polymer, and compound materials. Te system can be used for a variety of sample preparation applications such as:
• Scanning Electron Microscopy (SEM), • Transmission Electron Microscopy (TEM), • X-Ray Microscopy (XRM), • Atom-Probe-Tomography (APT), and • Micromechanics.
microPREP™ PRO complements existing approaches to sample preparation such as ion- beam processing (FIB, BIB, Ion-mill etc) and creates new vistas for micromachining sample preparation.
Our markets include R&D facilities as well as diagnostic laboratories in the field of semiconductor, photovoltaic, glass and display industry, and many more.
All of our products are manufactured in Germany with distribution and service channels worldwide. For our customers we also offer feasibility tests and contract manufacturing.
www.cambridge.org/mto 5
Snow Jet for cleaning samples during or aſter the process to have samples ready for the How to find us
3D-Micromac AG, Technologie-Campus 8, 09126 Chemnitz, Germany Tel: +49 371 400 43-222 Fax: +49 371 400 43-40 Email:
sales@3d-micromac.com URL:
https://www.microprep.pro
Page 1 |
Page 2 |
Page 3 |
Page 4 |
Page 5 |
Page 6 |
Page 7 |
Page 8 |
Page 9 |
Page 10 |
Page 11 |
Page 12 |
Page 13 |
Page 14 |
Page 15 |
Page 16 |
Page 17 |
Page 18 |
Page 19 |
Page 20 |
Page 21 |
Page 22 |
Page 23 |
Page 24 |
Page 25 |
Page 26 |
Page 27 |
Page 28 |
Page 29 |
Page 30 |
Page 31 |
Page 32 |
Page 33 |
Page 34 |
Page 35 |
Page 36 |
Page 37 |
Page 38 |
Page 39 |
Page 40 |
Page 41 |
Page 42 |
Page 43 |
Page 44 |
Page 45 |
Page 46 |
Page 47 |
Page 48 |
Page 49 |
Page 50 |
Page 51 |
Page 52 |
Page 53 |
Page 54 |
Page 55 |
Page 56 |
Page 57 |
Page 58 |
Page 59 |
Page 60 |
Page 61 |
Page 62 |
Page 63 |
Page 64 |
Page 65 |
Page 66 |
Page 67 |
Page 68 |
Page 69 |
Page 70 |
Page 71 |
Page 72 |
Page 73 |
Page 74 |
Page 75 |
Page 76 |
Page 77 |
Page 78 |
Page 79 |
Page 80 |
Page 81 |
Page 82 |
Page 83 |
Page 84 |
Page 85 |
Page 86 |
Page 87 |
Page 88 |
Page 89 |
Page 90 |
Page 91 |
Page 92 |
Page 93 |
Page 94 |
Page 95 |
Page 96 |
Page 97 |
Page 98 |
Page 99 |
Page 100
