Xe Plasma FIB
range of materials and operating parameters used to evaluate the true limits of this technology. To date, single cross sections up to 1 mm wide have been produced, and serial-sectioning cross sections up to 300 μ m across and 200 μ m deep have been fabricated with slice thicknesses 50–500 nm thick. More work still needs to be done to better understand material interactions with the Xe + Plasma FIB. However, in comparison to traditional metallographic preparations of similar materials, PFIB-prepared samples have improved surface quality, yielding EBSD maps and high-resolution images that are essentially artifact-free.
Conclusions
3D data from serial sectioning using the PFIB-SEM across a range of materials suggest that the Xe + PFIB can routinely and quickly provide 3D serial section tomographs over dimensions of many hundreds of micrometers whilst retaining nanoscale resolution. T is tomographic technique has the ability to capture the rich detail of microstructures, as well as provide analysis by EBSD and EDS. T e range of scales available helps bridge the gap between conventional Ga + FIB and X-ray tomography for multiscale, multimodal 3D analysis.
Acknowledgements
We acknowledge the EPSRC for grants EP/J021229/1 and EP/M010619/1 and BIS Capital Funding that established the Multidisciplinary Characterization facility. Further authors gratefully acknowledge N. J. Henry Holroyd for the provision for
the Aluminum sample, Peter Liaw from University of Tennessee for the BMG sample, and Mark Gee from NPL for the WC-Co sample. DWM would like thank Dr. J. S. Earl, GlaxoSmithKline Consumer Healthcare, for fi nancial support. Our thanks also go to Rene Dobbe, Doug Hahn, and Trisha Rice at FEI Company for their support during this work.
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[8] Introduction to Focused Ion Beams: Instrumentation, T eory, Techniques and Practice , eds. LA Giannuzzi and FA Stevie, Springer, New York, 2005.
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