12-01 :: January 2012

nanotimes

Companies Facts

litates us to achieve all the lithography challenges we are facing in our research. In respect to application support and service we know that we can count on the Vistec team as our strategic partner,” stated Prof. Jinsong Xia, director of the Optoelectronic Micro & Nano Fabrication and Characterization Facility (OMFC) at WNLO.

“We are very pleased to have reached this significant milestone in our partnership with WNLO at HUST, who can be assured that Vistec will be supporting them to the very best,” said Erwin Mueller, Managing Director Vistec Lithography, B.V. “The electron beam lithography system at WNLO is the first operational Vistec EBPG5000pES in the P.R. China, which opens great opportunities to a sustainable business develop- ment for Vistec in that region.”

http://www.vistec-semi.com http://english.hust.edu.cn http://goo.gl/0uYAc

V

TD Vakuumtechnik Dresden GmbH, Germany, and Fraunhofer IWS Dresden announced a

new development: the DREVA 600-LAM PVD hard material coating plant. The innovative system for depositing a new generation of DLC coatings on tools and components was jointly developed by Fraunho- fer IWS Dresden and VTD Vakuumtechnik Dresden GmbH. The plant has a coating volume of up to 1,100 milling cutters with a shaft diameter of 6 mm and an unbeatably short process time of less than 180 minutes. http://www.vtd.de

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© FhG IWS-Dresden / VTD Vakuumtechnik Dresden, Germany