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Rise Distance Method


to ensure statistical validity and avoiding “cherry-picking” of the data to make it appear the result is better than it actually is. As is always the case in attempting to measure quantities such as resolution, there are numerous factors that can lead to significant inaccuracies. Te issue of beam noise can easily be accounted for by averaging the results. Te issue of distortion of the results due to specimen morphology can be taken into account by looking carefully to see whether the rise distance is strictly monotonic. If these issues are not considered, the results are likely to be optimistic. All measurements of this type must be evaluated with great care.


References [1] J Orloff, LW Swanson, and M Utlaut, J Vac Sci Tech B14 (1996) 3759.


[2]V Castaldo, CW Hagen, B Rieger, and P Kruit, J Vac Sci Tech B26 (2008) 2107.


[3] J Orloff, Proc SPIE 7729, 77290C (2010). [4]B Rieger and GNA van Veen, EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany I3, I3.1 (2008) 613–14.


[5] JR Michael and DB Williams, J Microsc 147 (1987) 289–303.


[6]K Ohya and T Ishitani, J Electron Microsc (Tokyo) 53(3) (2004) 229–35.


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or information@evactron.com 32 www.microscopy-today.com • 2011 May Before Cleaning After Cleaning


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