search.noResults

search.searching

note.createNoteMessage

search.noResults

search.searching

orderForm.title

orderForm.productCode
orderForm.description
orderForm.quantity
orderForm.itemPrice
orderForm.price
orderForm.totalPrice
orderForm.deliveryDetails.billingAddress
orderForm.deliveryDetails.deliveryAddress
orderForm.noItems
FEAT RE FEA ATURE


COMMUN CAT ON


OMMUNICI ATIIONS & NE


NETWOR


ORKIING N G


Wireless sensor netw ork impr o sev semiconductor wafer fab efficienc y


Right: Predicting toxic gas usage with software analytics – Real-time gas usage readings are wirelessly sent to plant software which predicts gas replenishment schedules and helps in capacity planning


wirelessly sent to plant software which predicts gas replenishment


schedules and helps in capacity planning


Left: Improving Left: Improving


manufacturing efficiency - Semiconductor


companies use real-time monitoring to squeeze


manufacturing efficiency - Semiconductor


more efficiency out of the manufacturing process


companies use real-time monitoring to squeeze more efficiency out of the manufacturing process


By Ross Yu, product marketing ger, D st N tworks prod


By Ross Yu, product et ts an


facilities manager, Linear Technology NETWORK SOLVLVES THE PROBLEM In order to solve the wiring problem


Enrique Aceves, rem te office facilities m


ritical to the manufacturing of semiconductor wafers is the


“Linear Technology’s Dust Networks products arre chips and pre-certified PCB modules complete with wireless mesh networkingetwtwo softwareware


Net


Ne workrksks prorod and prere-cecer duleles


Linea Tec etwtwo


inear Te wi eleles


echchnololog oducts


errttitifififieied


modu es comp wirirerelessss mes soffttwtwar ”


ogy gy’s’s DusDustust


ductts are chips ed P


e chip mpletete wi plelet witithth eshsh networkinrkingking ger, Linear Technol gy NETWORK SOLVES C


meticulous, precision deposition of many layers of chemical materials to formthe thousands, to millions, and in some cases, billions of transistors that make up a wide variety of complex integrated circuits (ICs). During the fabrication process of these ICs, different chemical gases are precisely metered at every step with usage varying widely as dictated by the different processes. For the most part, these steps are highly automated. What is not automated, interestingly, is the simple keeping of adequate supply of these gases.


At Linear Technology Corporation’s Silicon Valley fab near San Jose,


California, over 175 specialty gas cylinders are used in the wafer manufacturing process. These gas cylinders are closely monitored to ensure uninterrupted


supply. Any unplanned interruption of gas supply would result in hundreds of thousands of dollars of wafer scrappage, revenue loss and create unacceptable delay in product shipments to customers. To avoid downtime, technicians manually log the pressure of each gas cylinder in the fab three times a day. This manual process is prone to human error and is expensive tomaintain.


22 22 NOVEMBER 201 OVEMBER 2016 | AU AUTOMA MAT ATION PROBLEM


Below: Gas gloset in semiconductor


pervasive metal and heavy concrete construction


manufacturing facility – ng


perform reliably amo Wireless nodes must


Below: Gas gloset in semiconductor manufacturing facility – Wireless nodes must perform reliably among pervasive metal and heavy concrete construction


approximately eight-year runn g life on normal operation. So no additional wiring and no unnecessary downtime is required to install the network, and only infrequent periodicmaintenance is required to change out the batteries. Despite the concrete construction andme tal structures in the fab, the network has proven to be highly reliable. At time of writing, the network has been up continuously for over 83 days, and has transmitted over 26 million data packet readings with only one packet lost, which translates into


without disrupting the fabrication process, a 32 node SmartMesh IP wirelessmesh network is initially deployed tomonitor the pressure of each gas tank in the closet (below). Every node is powered by a pair of lithiumAA L91 batteries to provide for in


>99.99999 per cent reliability. This is 100 times better than the stringent ‘five nines’ reliability expected of high availability


systems. This level of network communication networks and


ensures the factory to sustain


maintenance free as well as to allow for adverse changes in the factory and RF environment.


In the gas closet, each cylinder is measured for both tank pressure and regulated pressure and these readings are communicated to a central


computer reliability


Previously, this manual datalogging was used because communications wiring is deemed expensive and impractical in the fab. Cylinders are located throughout the facility, and for most of the cylinders, there are no AC power outlets or Ethernet jacks nearby. The building is constructed of concrete walls for safety and seismic (earthquake) reasons, making it cost- prohibitive to install new wires.


manager, Dust Networks products and wires would disrupt themanufacturing Enrique Aceves, remote office


process, causing factory downtime.


Furthermore, a large construction projoject to install power and communications


Right: Predicting toxic gas usage with software analytics – Real-time gas usage readings are


monitoring systemvia the SmartMesh wireless network. Each SmartMesh node is connected to a pair of cylinders and sends readings through the wireless mesh network to a web server across the building. In the control room, the fab’s site management software tools display real-time readings and automatically calculate run rates and trend lines to predict regular schedules for cylinder replacement (left) needs. In addition, low-pressure thresholds are set to alert facility technicians should cylinders reach advanced warning levels prior to the scheduled replacement. Alerts are displayed on the control room monitor and via Internet messaging to both


facility technician and plant managemen t on a 24/7 basis .


IIMPROVED EFFICIENC MPROVED EFFICIENCY CY


By using real-time gas consumption rates, technicians can precisely predict when gas cylinders will need to be replaced, reducing waste from unused gas due to premature cylinder changes. The benefits extend beyond efficiencies in day-to-day operations. By centrally collecting gas usage data and making it readily available to plant management, this systemenables trend analysis which further identifies opportunities to streamline plant operations by correlating readings with specific semiconductor fab processes and geometries. This helps to optimise fab capacity growth as the need arises .


SUMMAR SUMMARY


For semiconductor wafer processing facilities, optimising uptime and


increasing operational efficiency results in increased production output, improved yield and reduced down time. SmartMesh IP wireless mesh networks enable non- disruptive installation to retrofit a


running fab and monitor its gas cylinder usage. The wireless nodes fit within existing space confines and work reliably in the metal and concrete structure, while relaying real-time readings to plant management software. This data enables quick and a ccurate gas usag e estimation, ensuring timely


used to aid capacity wasted gas. Data po


www www.


Linear Technology ww.linear.com


/AUTOMATION AT /AUTOMATION


replenishment, reducing downtime and ints are logged and planning.


Page 1  |  Page 2  |  Page 3  |  Page 4  |  Page 5  |  Page 6  |  Page 7  |  Page 8  |  Page 9  |  Page 10  |  Page 11  |  Page 12  |  Page 13  |  Page 14  |  Page 15  |  Page 16  |  Page 17  |  Page 18  |  Page 19  |  Page 20  |  Page 21  |  Page 22  |  Page 23  |  Page 24  |  Page 25  |  Page 26  |  Page 27  |  Page 28  |  Page 29  |  Page 30  |  Page 31  |  Page 32  |  Page 33  |  Page 34  |  Page 35  |  Page 36  |  Page 37  |  Page 38  |  Page 39  |  Page 40  |  Page 41  |  Page 42  |  Page 43  |  Page 44  |  Page 45  |  Page 46  |  Page 47  |  Page 48  |  Page 49  |  Page 50  |  Page 51  |  Page 52  |  Page 53  |  Page 54  |  Page 55  |  Page 56