Lab-in-Gap TEM
corrects up to 5 th -order spherical aberrations of the objective lens, but also the off -axis aberrations [ 9 ]. Atomic-level and even sub-Ångstrom imaging resolution is thus achievable with the aberration-corrected, wide pole piece gap ETEM platform. Furthermore, the correction of parasitic off -axis astigmatism and 3 rd -order azimuthal off -axis coma fulfi lls the need for high-resolution imaging in a large fi eld of view. Large-size digital cameras such as 4k × 4k or 8k × 8k pixels can be used for in situ TEM without a concern of losing image resolution at distances far from the center of the fi eld of view. New experiments possible. Lab-In-Gap electron microscopy will soon enter a regime of precise control of multiple stimuli sources, gas or liquid environments, quanti- tative onsite measurement, and large area sub-Å resolution live imaging and spectroscopy analysis for dynamic structural and chemical changes inside and on the surface of specimens.
Conclusion
Hitachi started the eff orts for Lab-In-Gap electron microscopy in the early 1990s. T e eff orts included designing gas environmental TEM systems as well as special in situ TEM specimen holders with diff erent functions. Various types of Hitachi gas ETEM platforms are briefl y introduced in this article, and an example is given of Lab-In-Gap electron microscopy realized by applying a double heater-gas injection TEM holder on a gas ETEM system. T e latest Hitachi wide-pole-piece-gap, aberration-corrected ETEM platform has paved the way toward
integration of multi-functional devices in the TEM specimen area.
Acknowledgements T e author is grateful to Dr. T. Kamino, Dr. T. Yaguchi, Dr. M. Konno, H. Matsumoto, and Y. Mori of Hitachi High Technologies for providing support and sharing application data. T anks also to Emily Zhang for proofreading.
References [1] T e report can be downloaded from the website http://
science.energy.gov/bes/news-and-resources/reports .
[2] A Ziegler et al ., In-Situ Materials Characterization - Across Spatial and Temporal Scales , Springer-Verlag , Berlin Heidelberg, Germany , 2014 .
[3] XF Zhang and T Kamino , Microscopy Today 14 ( 6 ) ( 2006 ) 16 – 18 .
[4] H Matsumoto et al ., Microscopy and Analysis 11 ( 2013 ) 13 – 18 .
[5] T Kamino and H Saka , Microsc Microanal M 4 ( 1993 ) 127 – 35 .
[6] T Kamino et al ., J Electron Microsc (Tokyo) 43 ( 1994 ) 104 – 10 .
[7] H Saka et al ., MRS Bulletin 33 ( 2008 ) 93 – 100 . [8] T Kamino et al ., J Electron Microsc 55 ( 5 ) ( 2006 ) 245 – 52 . [9] I Maßmann et al ., Microsc Microanal 17 ( Suppl 2 ) ( 2011 ) 1270 – 71 .
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28
www.microscopy-today.com • 2016 January
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