Oxford Instruments Advanced Process Tools for Etch, Deposition and Growth


Leading edge, flexible systems for precise, controllable and repeatable etching, deposition and growth of micro and nanostructures


Great uniformity, high throughput and extensive process library


Plasma Etch & Deposition Atomic Layer Deposition Ion Beam Etch & Deposition Nanoscale Growth Systems Hydride Vapour Phase Epitaxy


For more information, please contact Oxford Instruments Plasma Technology: Tel: +44 (0)1934 837 000 Email: plasma@oxinst.com


www.oxford-instruments.com/plasma


Reduce Greenhouse Gas Emissions


Fluorinated High Boiler Grades 170°C to 270°C


Using a High Boiler Reduces • Product Consumption • Emissions into the Atmosphere • Maintenance Costs


Galden® PFPE Inert Heat Transfer Fluids www.lesker.com 11-186


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